Korea Institute of Fusion Energy

Jong Sik Kim

Yong Sup Choi

Kang Il Lee

Seung Ryul Yoo

Dong Chan Seok

Soo Ouk Jang

Young Woo Kim

A window device for diagnosis of plasma OES (Optical Emission Spectroscopy), is disclosed and includes a housing including a first chamber and a second chamber horizontally adjacent to each other; a connection opening defined in one face of the housing and between the first and second chambers, the connection opening faces toward an opening through which light of plasma from a plasma chamber is exposed to the connection opening; an observation window opening defined in an opposite face of the housing opposite to the connection opening, the observation window opening is coaxial with the connection opening, the light of the plasma transmits through the observation window opening, and is incident to a light receiver of an OES sensor; an observation window positioned inside the observation window opening and in the housing; a winder and a rewinder installed in the first and second chambers, respectively; and a transparent film.

Window for plasma OES diagnosis, and plasma apparatus using same

An atomic layer polishing method is described. The method includes: scanning the surface of a specimen to measure a peak site on the specimen surface; spraying toward the measured peak site a gas containing an element capable of binding to a first atom, which is an ingredient of the material of the specimen to form a first reaction gas layer in which the first reaction gas binds to the first atom on the surface of the peak; and projecting ions of inert gas to the peak site on which the first reaction gas layer is deposited to separate the first atom bound to the first reaction gas from the specimen.

Atomic layer polishing method and device therefor

Growing community of inventors

Gunsan, South Korea

Jong Sik Kim