Soonhan Engineering, Inc.

Jong Kyu Seo

Byoung Gwan Ko

Banik Rahul

Soo Keun Shin

Chul Jung

Yonk Uk Kwon

Yong Uk Kwon

In a system for compensating dynamic and thermal deformity errors of a linear motion single-plane gantry stage in real time, a stage apparatus using the system, and manufacturing, measuring, and inspecting apparatuses using the system, the system includes: a first two-dimensional position measuring unit arranged in each of two linear edge beams respectively positioned in both sides of the linear motion single-plane gantry stage for measuring the position of an X-axially movable gantry beam to provide a feedback of an X-axial motion thereof; a second two-dimensional position measuring unit for measuring the position of a Y-axially movable slider movable on the X-axially movable gantry beam to provide a feedback of a Y-axial motion thereof; a thermal fixing point provided as a thermal reference for measuring a thermal expansion of the X-axially movable gantry beam; and a compensation control unit for controlling an error motion of the linear motion single-plane gantry stage in real time by measuring dynamic and thermal deformity errors based on the data received from the first and the second two-dimensional position measuring unit.

System for compensating dynamic and thermal deformity errors of linear motion single-plane gantry stage in real time, stage apparatus, manufacturing thereof, and measuring and inspection equipment

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Seongnam, South Korea

Jong Kyu Seo