Electronics and Telecommunications Research Institute

Jong Jin Jung

Jaewoo Lee

Seungeon Moon

Jong Pil Im

Jeong Hun Kim

Do Joon Yoo

Provided is a gas sensor including a substrate, a first membrane disposed on the substrate, a heating structure disposed on the first membrane, a second membrane disposed on the heating structure, a sensing electrode disposed on the second membrane, and a sensing material structure disposed on the sensing electrode. Here, the substrate provides an isolation space defined by a recessed surface obtained as a portion of a top surface of the substrate is spaced downward from a bottom surface of the first membrane, and the first membrane provides a first membrane etching hole that vertically extends to connect a top surface and the bottom surface of the first membrane and is connected with the isolation space. Also, the first membrane etching hole has a diameter of about 3 μm to about 20 μm.

Growing community of inventors

Paju-si, South Korea

Jong Jin Jung