Applied Spectra, Inc.

Applied Materials, Inc.

Other

Frito-lay North America, Inc.

Jong Hyun Yoo

Chunyi Liu

Richard E Russo

Randolph S Tribe

Alexander A Bol'shakov

Ming Xi

Xinliang Lu

Alfred W Mak

Ken Kaung Lai

Robert L Jackson

Ping Jian

Scott Fagan

Chen C Shao

Sudeep J Pandey

Paul Allan Martin

Xianglei Mao

Osman Sorkhabi

Scotty G Richardson

Apparatus for laser induced ablation spectroscopy (LIBS) is disclosed. An apparatus can have a computer, a pulsed laser and a lightguide fiber bundle that is subdivided into branches. One branch can convey a first portion of the light to a first optical spectrometer and a different branch can convey a second portion of the light to another optical spectrometer. The first spectrometer can be relatively wideband to analyze a relative wide spectral segment and the other spectrometer can be high dispersion to measure minor concentrations. The apparatus can further comprise an unbranched lightguide fiber bundle to provide more light to a low sensitivity spectrometer. The apparatus can include an inductively coupled plasma mass spectrometer ICP-MS and a computer instructions operable to provide normalized LIBS/ICP-MS composition analyses.

Laser ablation spectrometry apparatus

Apparatus for laser induced ablation spectroscopy (LIBS) is disclosed. An apparatus can have a computer, a pulsed laser and a lightguide fiber bundle that is subdivided into branches. One branch can convey a first portion of the light to a first optical spectrometer and a different branch can convey a second portion of the light to another optical spectrometer. The first spectrometer can be relatively wideband to analyze a relative wide spectral segment and the other spectrometer can be high dispersion to measure minor concentrations. The apparatus can have a plurality of spectrometers with distinct and/or complementary capabilities, and can include an inductively coupled plasma mass spectrometer and data and instructions in tangible media operable to obtain a synergistic composition analysis based on optical spectra and ion mass to charge ratio peaks from the mass spectrometer.

Apparatus for laser ablation analysis

Methods for laser induced ablation spectroscopy (LIBS) are disclosed. Light from laser ablation can be gathered into a lightguide fiber bundle that is subdivided into branches. One branch can convey a first portion of the light to a broadband spectrometer operable to analyze a relatively wide spectral segment, and a different branch can convey a second portion of the light to a high dispersion spectrometer operable to measure minor concentrations and/or trace elements. Emissions can be analyzed using a plurality of spectrometers having distinct and/or complementary capabilities, and with a synergistic method using inductively coupled plasma mass spectrometry.

Laser ablation analysis

Methods for laser induced ablation spectroscopy are disclosed. A sample site position sensor, and stage position motors can move the stage in three independent spatial coordinate directions, and a stage position control circuit is used to move an analysis sample site to selected coordinate positions for laser ablation. Light emitted from a plasma plume produced with laser ablation can be gathered into a lightguide fiber bundle that is subdivided into branches. One branch can convey a first portion of the light to a broadband spectrometer operable to analyze a relatively wide spectral segment, and a different branch can convey a second portion of the light to a high dispersion spectrometer operable to measure minor concentrations and/or trace elements. Emissions from a plasma plume can be simultaneously analyzed in various ways using a plurality of spectrometers having distinct and/or complementary capabilities.

Methods for laser ablation analysis

A method and apparatus for analyzing one or more elements of targeted moving food surfaces uses laser-induced breakdown spectroscopy to detect the presence, absence, or amount of an element on a heterogeneous surface of an object, including surfaces of food products. A laser is used to quantify an element concentration without destroying the object. The method can be configured to include an automated on-line system comprising a closed-loop feedback control system operable to select a predetermined concentration.

Method for elemental analysis in a production line

Methods for laser induced ablation spectroscopy are disclosed. A position sensor, and position motors can move a sample stage in three independent spatial coordinate directions, and a stage position control circuit can move an analysis sample site to selected coordinate positions for ablation. Light from laser ablation can be gathered into a lightguide fiber bundle that is subdivided into branches. One branch can convey a first portion of the light to a broadband spectrometer operable to analyze a relatively wide spectral segment, and a different branch can convey a second portion of the light to a high dispersion spectrometer operable to measure minor concentrations and/or trace elements. Emissions can be simultaneously analyzed in various ways using a plurality of spectrometers having distinct and/or complementary capabilities, and isotope analysis of a sample can be performed.

Laser ablation analysis techniques

A method and apparatus for analyzing one or more elements of targeted moving snack food surfaces uses laser-induced breakdown spectroscopy to detect the presence, absence, or amount of an element on a heterogeneous surface, including seasoned and ready-to-eat snack foods. A laser is used to quantify the element concentration without destroying the targeted sample. An automated on-line system may be integrated into the method to create a closed-loop feedback control system, adjusting the concentration as desired.

Method for elemental analysis of a snack food product in a dynamic production line

A method for real-time optical diagnostics in laser ablation and laser processing of layered or structured materials or material structures. Diagnostics is provided during laser ablation that is utilized regularly in laser processing and/or chemical analysis of structured materials, by means of measuring optical emission generated as a result of the pulsed laser-material interaction in real time. The method can involve a single-layer-film or a stack of multiple layers or a structure of different domains. The method is particularly beneficial in fabrication of thin-film structures, such as photovoltaic and electronic devices or circuits of devices.

Method for real-time optical diagnostics in laser ablation and laser processing of layered and structured materials

Provided is a laser ablation spectroscopy apparatus and method. A pulse laser is focused on the sample site to generate a plasma plume during a laser ablation process. The plasma plume is detected with a spectrometer and an intensified charge coupled device. A sample of material is coupled to a stage movable in the x, y and z directions using an array of x-y-z motors. A change in the height of the sample is detected using a triangulation sensor. The apparatus includes a system computer for synchronizing the movement of the stage in the x, y and z direction during the laser ablation process. The method includes a protocol of generating one or more laser ablations per sample site. The spectral data of the total number of laser ablations for each sample site are averaged together. The protocol includes laser ablating additional sample sites and averaging the spectral data of the total number of sample sites.

Laser ablation apparatus and method

In one embodiment, a method for depositing a tungsten material on a substrate within a process chamber is provided which includes exposing the substrate to a gaseous mixture containing a tungsten precursor and a reducing gas to deposit a tungsten nucleation layer on the substrate during a tungsten deposition process. The process further includes removing reaction by-products generated during the tungsten deposition process from the process chamber, exposing the substrate to the reducing gas to react with residual tungsten precursor within the process chamber during a soak process, removing reaction by-products generated during the soak process from the process chamber, and repeating the tungsten deposition process and the soak process during a cyclic deposition process. In the examples, the reducing gas may contain diborane or silane.

Pulsed deposition process for tungsten nucleation

A method of forming a tungsten nucleation layer using a sequential deposition process. The tungsten nucleation layer is formed by reacting pulses of a tungsten-containing precursor and a reducing gas in a process chamber to deposit tungsten on the substrate. Thereafter, reaction by-products generated from the tungsten deposition are removed from the process chamber. After the reaction by-products are removed from the process chamber, a flow of the reducing gas is provided to the process chamber to react with residual tungsten-containing precursor remaining therein. Such a deposition process forms tungsten nucleation layers having good step coverage. The sequential deposition process of reacting pulses of the tungsten-containing precursor and the reducing gas, removing reaction by-products, and than providing a flow of the reducing gas to the process chamber may be repeated until a desired thickness for the tungsten nucleation layer is formed.

Growing community of inventors

Milpitas, CA, United States of America

Jong Hyun Yoo