Samsung Electro-mechanics Co., Ltd.

Jong-Hyeong Song

Seung-Do An

Sang Kyeong Yun

Dong-Ho Shin

Heung-Woo Park

Yurlov Victor

Yun-Jin Ko

Yoon-Joon Choi

Yoon-Shik Hong

Anatoliy Lapchuk

Jong-Su Yi

Je-Hong Kyoung

Jeong-Suong Yang

Jae-Wook Jang

Young-Gyu Lee

Min-Suk Oh

Disclosed is a diffractive micromirror and a method of producing the same. More particularly, the present invention pertains to a diffractive thin-film piezoelectric micromirror, which is operated in a piezoelectric operation manner to assure excellent displacement, operation speed, reliability, linearity, and low voltage operation, and a method of producing the same. The diffractive thin-film piezoelectric micromirror includes a silicon substrate on which a recess is formed to provide an air space to the center thereof, and a piezoelectric mirror layer having a band shape, which is attached to the silicon substrate along both ends of the recess at both ends thereof while being spaced from the bottom of the recess at a center portion thereof and which includes a thin-film piezoelectric material layer to be vertically movable when voltage is applied to the piezoelectric material layer, and thus diffracts an incident light beam.

Diffractive thin-film piezoelectric micromirror and method of producing the same

Disclosed are a method for driving a piezoelectric element or an optical modulator including a piezoelectric element and a recorded medium recorded with a program for executing the same. In accordance with an embodiment of the present invention, the method for driving a piezoelectric element causing a displacement object to be displaced by being contracted or expanded according to a supplied driving voltage, including supplying a driving signal to the piezoelectric element during a first driving period in a first voltage range; supplying a control signal for controlling a polarization hysteresis of the piezoelectric element according to a driving, performed during the first driving period, to the piezoelectric element; and supplying the driving signal to the piezoelectric element during a second driving period in a second voltage range.

Method for driving piezoelectric element or optical modulator including piezoelectric element

Disclosed is an optical modulator including: a substrate; an insulation layer disposed on the substrate; a ribbon layer, a center portion of which is spaced apart from the insulation layer by a predetermined gap; a piezoelectric element that is disposed on the ribbon layer and allows the center portion of the ribbon layer to bend vertically; and a passivation layer that is disposed on the piezoelectric element and comprises a main passivation film.

Spatial optical modulator with passivation layer

An optical modulator module is disclosed, comprising a bendable flexible printed circuit board in which a circuit pattern is formed, and to which control signals are inputted from the outside; an optical modulator element modulating an incident light according to a driving voltage and sending out the modulated light; an at least partially transparent substrate through which the incident light and the modulated light pass, and in which a circuit pattern is formed; and a driving integrated circuit electrically connected with the flexible printed circuit board, and supplying the optical modulator element with the driving voltage according to the inputted control signals, the flexible printed circuit board being electrically connected with the substrate.

Miniature optical modulator module using flexible printed circuit board

An optical modulator having a junction layer is disclosed. An optical modulator may be provided which includes a substrate, an insulation layer positioned on the substrate, a ribbon layer positioned with an intermediate portion spaced apart from the insulation layer by a predetermined distance, a protective layer positioned on both ends of the ribbon layer, a junction layer positioned on the protective layer which has an adhesive property and which prevents the diffusion of gas, and a piezoelectric element joined with the protective layer by way of the junction layer interposed in-between which moves the intermediate portion of the ribbon layer toward and away from the substrate. In certain embodiments of the invention, the light diffraction property and reliability of the overall optical modulator can be maximized, by positioning a junction layer, having improved adhesion and capable of preventing the diffusion of oxygen, on the lower surface of the piezoelectric elements.

Optical modulator

Disclosed is a diffractive micromirror and a method of producing the same. More particularly, the present invention pertains to a diffractive micromirror, in which a recess having a desired depth and width is precisely formed in a piezoelectric operation manner, and a method of producing the same.

Disclosed herein is a variable grating diffractive light modulator, which actuates lower reflecting plates of a lower reflecting array by a piezoelectric actuating method, and includes an upper reflecting array that is spaced apart from the lower reflecting array and attached to a lower surface of a substrate that is made of a light transmissive material and covers the lower reflecting array, so that the light modulator reflects incident light transmitted through the substrate and thereby produces diffractive light.

Variable grating diffractive light modulator

An embedded IC packaging structure is disclosed. The embedded IC packaging structure allows a micro-electro-mechanical system (MEMS) having a great number of electrodes to be bonded to another semiconductor device, such as a driver IC, using a secondary substrate, thus ensuring an easy bonding process, providing IC devices capable of executing high-speed signal processing, reducing the production costs, and improving the production yield of the IC devices.

Embedded integrated circuit packaging structure

Disclosed herein are an electrostatic-type variable diffractive light modulator, which includes lower micromirrors that are provided on a glass substrate to be spaced apart from each other, and actuates upper micromirrors that are spaced apart from the substrate by an electrostatic actuating method, thus allowing the upper and lower micromirrors to diffract incident light entering a lower portion of the substrate, and a method of manufacturing the electrostatic-type variable diffractive light modulator.

Electrostatic-type variable diffractive light modulator and manufacturing method thereof

Disclosed is a spatial light modulator using a near-field. The spatial light modulator includes a light permeable substrate which has a predetermined first refractive index and allows incident light passing through a side thereof from an external light source to permeate therethrough. A near-field forming member has a second refractive index smaller than the first refractive index, and is formed on the other side of the light permeable substrate to achieve total reflection of the incident light to form the near-field. Actuating elements each have a third refractive index larger than the second refractive index, and are formed on the other side of the light permeable substrate to be moved close to or away from the near-field, thereby transforming the near-field.

Growing community of inventors

Kyunggi-do, South Korea

Jong-Hyeong Song