Samsung Electronics Co., Ltd.

Jong Hwi Seo

Yong Won Choi

Seok Heo

Jieun Yang

Taemin Earmme

Kwang Jun Kim

Hyun Sik Sim

Ki Hoon Nam

Tae Jun Sang

Gui Hyun Cho

Dong-il Yoon

Provided is a load cup including a cup having an internal space, a pedestal provided in the internal space, able to be lifted up and down, and loading a wafer onto or unloading a wafer from a polishing head, and a plurality of arrangement parts having a plurality of fastening portions disposed around the pedestal, and moved horizontally in a direction of a center of the pedestal, and arrangement part bodies coupled to the plurality of fastening portions, respectively, and rotated or reciprocated so as to contact a lateral surface of the polishing head, adjusting a center of the wafer to be aligned with a center of the polishing head. A polishing process may then be performed on a layer formed on the wafer.

Load cup and chemical mechanical polishing apparatus and method of manufacturing including the same

A probe card handling carriage is applicable to various working environments. The probe card handling carriage includes a main body provided to be travelable on the ground, a drawer unit provided to be movable in a forward and backward direction with respect to the main body, and a transfer robot installed on the drawer unit to transfer a probe card.

Probe card handling carriage

Growing community of inventors

Suwon-si, South Korea

Jong Hwi Seo