Samsung Electronics Co., Ltd.

Jong-Hwan Weon

Kyung-Bo Sim

Jae-woo Chung

Hee-Sun Chae

Hyo-Sang Jung

Myung-Kill Kim

Tae-Ha Jeon

Tae-Ha Jun

A control system for a semiconductor processing apparatus comprises a control server connected to a semiconductor processing apparatus, a verification server connected to the control server, and a database connected to the verification server. The verification server evaluates input parameter values stored in the semiconductor processing apparatus against verification data stored in the database. The results of the evaluation are used to determine whether a process will be performed by the semiconductor processing apparatus.

Control system for semiconductor processing apparatus

A method for preventing process errors in a semiconductor fabricating process allows only a few authorized engineers to release interlocks of semiconductor fabricating equipment when a count of interlock occurrences exceeds a predetermined number within a predetermined period of time. By allowing a semiconductor fabricating equipment operator only limited ability to reset equipment interlocks, repeated interlock conditions caused by test specification failures may be over-ridden only a predetermined number of times before the semiconductor fabricating equipment is disabled completely. The disabled semiconductor fabricating equipment may only be re-enabled using an authorization code, which is only made available to selected personnel, thereby ensuring that necessary repairs and corrections have been implemented on the semiconductor fabricating equipment.

Process error prevention method in semiconductor fabricating equipment

Growing community of inventors

Suwon-si, South Korea

Jong-Hwan Weon