Samsung Electronics Co., Ltd.

Korea Electronics Technology Institute

Finetex Ene, Inc.

Jong-Chul Park

Byoung-Jae Bae

Sang-sup Jeong

Byung-Gil Choi

Ki-sung Kim

Sang-Hyun Lee

Ji-Hyun Jeong

Shin-Jae Kang

Sung-Won Kim

Hyung-joon Kwon

In-Keun Lee

Chang-Woo Sun

Young-Seok Choi

Il-mok Park

Seul-ji Song

Hye-Ji Yoon

Yong-Woo Lee

Dong Jun Shin

Jong-Kyu Kim

Jae-Hun Seo

Se-Chung Oh

Jeong-Heon Park

In-Ho Kim

Sang-Kuk Kim

Ji-Won Ha

Yun-seung Kang

Gwang-Hyun Baek

Sun-Mi Yoo

Shin Kwon

Min Cheol Kwon

O-Ik Kwon

Young-ran Kim

Jeong-Hoe Ku

Woo-Hyun Lee

Chan-Mi Lee

Chang-han Choi

Hyuk-Jin Kwon

Ho-keun Cho

Jong-Soon Park

Jong-soo Seo

Chan-sei Yoo

Woo-sung Lee

Dongsu Kim

Nam-kee Kang

Hochang Jeong

Byong-Jae Bae

Eun-Sun Noh

Chae-Lyoung Kim

A semiconductor device includes a substrate, a gate structure on the substrate, a first etch stop layer, a second etch stop layer, and an interlayer insulation layer that are stacked on the gate structure, and a contact plug penetrating the interlayer insulation layer, the second etch stop layer, and the first etch stop layer and contacting a sidewall of the gate structure. The contact plug includes a lower portion having a first width and an upper portion having a second width. A lower surface of the contact plug has a stepped shape.

Semiconductor device with a contact plug adjacent a gate structure

A method of fabricating a memory device may include forming a first conductive line extending over a substrate in a first direction, forming a memory cell pillar on the first conductive line, and forming a second conductive line extending over the memory cell pillar in a second direction that intersects the first direction, such that the first and second conductive lines vertically overlap with the memory cell pillar interposed between the first and second conductive lines. The memory cell pillar may include a heating electrode layer and a resistive memory layer. The resistive memory layer may include a wedge memory portion and a body memory portion. The wedge memory portion may contact the heating electrode layer and may have a width that that changes with increasing distance from the heating electrode layer. The body memory portion may be connected to the wedge memory portion.

Memory device with memory cell pillar having resistive memory layer with wedge memory portion and body memory portion, and method of fabricating the same

A semiconductor device includes a stacked structure of cell structures, an electrode structure, and a heating electrode. Each cell structure includes a capping layer, a selection layer, a buffer layer, a variable resistance layer, and a upper electrode layer sequentially stacked. The electrode structure is in an opening passing through the stacked structure, is electrically isolated from the buffer layer, the variable resistance layer, and the upper electrode layer, and is electrically connected to the selection layer. The heating electrode is between the variable resistance layer and the upper electrode layer and operates to transfer heat to the variable resistance layer.

Semiconductor devices including a stacked cell structure

A variable resistance memory device including a first conductive line extending in a first direction on a substrate, a second conductive line on the first conductive line and extending in a second direction crossing the first direction, and a memory cell pillar connected to the first conductive line and the second conductive line at a crossing point therebetween and including a heating electrode layer and a variable resistance layer in contact with the heating electrode layer such that both sidewalls of the heating electrode layer are aligned with both sidewalls of the first conductive line in the first direction.

Variable resistance memory device and method of manufacturing the same

Semiconductor devices including a plurality of stacked cell structures

A memory device may include a first conductive line, a second conductive line extending in a direction intersecting the first conductive line, such that the first conductive line and the second conductive line vertically overlap at a cross-point between the first conductive line and the second conductive line, and a memory cell pillar at the cross-point. The memory cell pillar may include a heating electrode layer and a resistive memory layer contacting the heating electrode layer. The resistive memory layer may include a wedge memory portion having a width that increases continuously in proportion with increasing distance from the heating electrode layer, and a body memory portion connected to the wedge memory portion such that the body memory portion and the wedge memory portion comprise an individual and continuous layer, the body memory portion having a greater width than the wedge memory portion.

In a method of manufacturing an MRAM device, a lower electrode and a preliminary first free layer pattern sequentially stacked are formed on a substrate. An upper portion of the preliminary first free layer pattern is removed to form a first free layer pattern. A second free layer and a tunnel barrier layer are sequentially formed on the first free layer pattern. The second free layer is partially oxidized to form a second free layer pattern. A fixed layer structure is formed on the tunnel barrier layer.

Magnetoresistive random access memory device

Manufacturing an MRAM device may include forming an upper electrode on a magnetic tunnel junction stack, where the stack may include a lower electrode layer, a magnetic tunnel junction layer and a middle electrode layer that are sequentially formed on an insulating interlayer and a lower electrode contact on a substrate. The upper electrode may be formed on the middle electrode layer. An upper electrode protective structure may be formed to cover at least a sidewall and an upper surface of the upper electrode. The middle electrode layer, the magnetic tunnel junction layer and the lower electrode may be patterned by an etching process to form a middle electrode, a magnetic tunnel junction pattern and a lower electrode, respectively. The upper electrode protective structure may isolate the upper electrode from exposure during the patterning, and the upper electrode protective structure may remain on the upper electrode subsequently to the patterning.

Magnetoresistive random access memory devices and methods of manufacturing the same

A method of fabricating a memory device, the method including forming a first magnetization layer; forming a tunnel barrier layer on the first magnetization layer; forming a second magnetization layer on the tunnel barrier layer; forming a magnetic tunnel junction (MTJ) structure by patterning the first magnetization layer, the tunnel barrier layer, and the second magnetization layer; and forming a boron oxide in a sidewall of the MTJ structure by implanting boron.

Method of fabricating memory device

Magnetoresistive random access memory device and method of manufacturing the same

A method of manufacturing magnetoresistive random access memory (MRAM) device includes forming first and second patterns on a substrate in an alternating and repeating arrangement, forming a first capping layer on top surfaces of the first and second patterns, and removing first portions of the first capping layer and a portion of the second patterns thereunder to form first openings exposing the substrate. The method further includes forming source lines filling lower portions of the first openings, respectively, forming second capping layer patterns filling upper portions of the first openings, respectively, and removing second portions of the first capping layer and a portion of the second patterns thereunder to form second openings exposing the substrate. Then, contact plugs and pad layers are integrally formed and sequentially stacked on the substrate to fill the second openings.

Method of manufacturing a magnetoresistive random access memory device

In a method of manufacturing an MRAM device, a first sacrificial layer, an etch stop layer, and a second sacrificial layer are sequentially formed on a substrate and then partially etched to form openings therethrough. Lower electrodes are formed to fill the openings. The first and second sacrificial layers and portions of the etch stop layer are removed to form etch stop layer patterns surrounding upper portions of sidewalls of the lower electrodes, respectively. An upper insulating layer pattern is formed between the etch stop layer patterns to partially define an air pad between the lower electrodes. A first magnetic layer, a tunnel barrier layer, a second magnetic layer, and an upper electrode layer are formed, and are etched to form a plurality of magnetic tunnel junction (MTJ) structures. Each MTJ structure includes a sequentially stacked first magnetic layer pattern, tunnel layer pattern, and second magnetic layer pattern, and each of the MTJ structures contacts a corresponding one of the lower electrodes.

Methods of manufacturing a magnetoresistive random access memory device

In a method of an MRAM device, first and second patterns are formed on a substrate alternately and repeatedly in a second direction. Each first pattern and each second pattern extend in a first direction perpendicular to the second direction. Some of the second patterns are removed to form first openings extending in the first direction. Source lines filling the first openings are formed. A mask is formed on the first and second patterns and the source lines. The mask includes second openings in the first direction, each of which extends in the second direction. Portions of the second patterns exposed by the second openings are removed to form third openings. Third patterns filling the third openings are formed. The second patterns surrounded by the first and third patterns are removed to form fourth openings. Contact plugs filling the fourth openings are formed.

Methods of manufacturing magnetoresistive random access memory devices

Provided are an apparatus and a method for creating a widget of a portable terminal. The method includes: determining a building block that a user selects on a widget creating screen including building blocks necessary for widget creation; generating a tag of data corresponding to the confirmed building block; and generating a widget code including the building block and the tag.

Apparatus and method for creating widget in portable terminal

Growing community of inventors

Seongnam-si, South Korea

Jong-Chul Park