Motion Device Inc.

Psk Inc.

Hynix Semiconductor Inc.

Kumho Electric Inc.

Jong Chan Lee

Geon Jong Kim

Yu Sin Kang

Sang Gon Chun

Min-Su Kim

Min Ho Choi

Ju Young Park

Je-Yoon Kim

Kwang Sung Yoo

Tae Hwan Youn

Da In Kim

You Jin Choi

Chan Jun Park

Seok June Yun

Jun Young Cho

Hyeon Gyeong Shin

A substrate treating apparatus includes a housing, treating space and support unit to support a substrate, dielectric plate, gas supply unit, and plasma source to generate a plasma and including a top edge electrode above the edge region supported by the support unit and bottom edge electrode below the edge region supported by the support unit, which includes a support plate having an inner space and vacuum hole that communicates with the inner space and sucking the substrate on the top surface. A lift pin assembly can transfer the substrate between an outside transfer unit and the support plate. A decompression unit can apply negative pressure to the inner space. The lift pin assembly includes a base plate and through hole penetrating the base plate to provide negative pressure in a region under the base plate to a region over the base plate. Lift pins protrude from the base plate and support a bottom substrate surface. A driver can lift/lower the base plate within the inner space.

Support unit, and apparatus for treating substrate with the same

Provided herein is a driving apparatus for transporting a loaded object, which allows a drive-wheel to always be in contact with the ground even when the ground is uneven. The driving apparatus includes a loading plate () on which a loaded object is loaded, a first support () connected to a lower portion of one side of the loading plate (), a second support () connected to a lower portion of the other side of the loading plate (), a hinge () configured to connect the first support () to the second support () in a hinge structure, at least a pair of drive-wheels () coupled to both sides of a lower portion of the second support (), and a driver configured to rotate and drive the drive-wheels ().

Driving apparatus maintaining ground contact of drive-wheel

Disclosed is a payload transportation device for transporting a payload, which has a low height and in which driving wheels are configured to come into constant contact with a ground surface even when the ground surface is uneven. The payload transportation device includes a loading plate above which a payload is loaded, a lift-driving portion configured to generate a driving force to vertically lift the loading plate, a first assembly configured to support a bottom of one side of the loading plate and in which some components included in the lift-driving portion are provided, a second assembly configured to support a bottom of the other side of the loading plate and in which other components included in the lift-driving portion are provided, hinge portions configured to connect the first assembly to the second assembly in a hinge structure, at least a pair of driving wheels coupled to both sides of a bottom of any one of the first assembly and the second assembly, and a driving unit configured to rotate the driving wheels.

Payload transportation device

Disclosed is a payload lifting device capable of stably lifting a payload using one lift-driving unit. In the payload lifting device including a lift-driving portion configured to vertically lift a payload, the lift-driving portion includes lift-driving units configured to generate a driving force for vertically lifting the payload, a first power transmission portion including first power transmission members which vary in vertical positions and apply a vertically lifting force to one side of a bottom of the payload when a first rotational shaft rotated by the driving force of the lift-driving units rotates, and a second power transmission portion including second power transmission members which vary in vertical positions and apply a vertical lifting force to the other side of the bottom of the payload when a second rotational shaft rotated by the driving force of the lift-driving units rotates.

Payload lifting device

A substrate processing apparatus are provided. The substrate processing apparatus allows a supply flow rate per unit time for process gas supplied to the central area of a substrate to be greater than a supply flow rate per unit time for process gas supplied to an edge area of the substrate, when processing the edge area of the substrate supported by the chuck.

Substrate processing apparatus and substrate processing method

An apparatus for processing a substrate includes a housing having a processing space therein, a transfer robot that loads the substrate into the processing space or unloads the substrate from the processing space, a support unit including a chuck that supports the substrate in the processing space and a lift pin that moves the substrate in an up-down direction, a dielectric plate having a lower surface disposed to face an upper surface of the chuck, and a gap measurement unit that measures a gap between the dielectric plate and the substrate supported by the lift pin or a gap between the dielectric plate and the chuck.

Substrate processing apparatus and substrate transfer method

An apparatus for processing a substrate is provided. The apparatus for processing the substrate includes a housing having a process space, a gas supply unit to supply gas into the process space, a support unit including a chuck to support the substrate in the process space and a lower electrode to surround the chuck when viewed from a top, a temperature adjusting plate provided in the housing, a dielectric plate unit coupled to the temperature adjusting plate, and having a dielectric plate disposed in opposite to the substrate supported by the support unit in the process space, and an upper electrode unit coupled to the temperature adjusting plate, and having an upper electrode disposed in opposition to the lower electrode. The dielectric plate unit includes a first base disposed between the dielectric plate and the temperature adjusting plate.

A motion simulator capable of preventing shaking of a riding part is disclosed. The motion simulator includes a riding part and a plurality of driving parts, wherein the plurality of driving parts include a first driving part, a second driving part and a third driving part, and the first driving part includes a first linear actuator configured to linearly reciprocate a first moving body, first movable link members each having a lower end portion hinged to the first moving body, a first fixed link member hinged to the first movable link members, a first support link member supporting one side of the first fixed link member and hinged at the lower end portion of the first fixed link member, and a second support link member supporting the other side of the first fixed link member.

Motion simulator

Provided are an intelligent service system, apparatus, and method for simulators which provide a high quality announcement service compared to that of by humans. The intelligent service system for simulators includes an information collection section configured to collect information on a simulation participant or onlookers from an information collector, and an announcement generator configured to generate an announcement to be provided to the simulation participant or onlookers based on the information collected by the information collection section.

Intelligent service system, apparatus, and method for simulators

A motion simulator capable of being manufactured to have a small size so that an occupied area can be reduced, is provided. The motion simulator includes: an upper frame; a lower frame; a first link portion configured to have a bottom end hinged to one side of a rear end of the lower frame and a top end connected to one side of a rear end of the upper frame so that pitching rotation of the upper frame is performed, and to move one side of the rear end of the upper frame in a vertical direction using a first driving unit; a second link portion configured to have a bottom end hinged to the other side of the rear end of the lower frame and a top end connected to the other side of the rear end of the upper frame so that pitching rotation of the upper frame is performed, and to move the other side of the rear end of the upper frame in the vertical direction using a second driving unit; a third driving unit configured to be provided on the lower frame; and a third link portion configured to support a lower portion of the upper fame so that pitching and rolling rotation of the upper frame is performed, and to move the upper frame in the vertical direction using the third driving unit.

Provided is a motion simulator with two degrees of freedom of angular motion that is capable of performing pitching rotation and yawing rotation. The motion simulator includes: a first rotation body () that a user boards; a second rotation body () located under the first rotation body (); a first driving unit () for pitching the first rotation body (); a second driving unit () for yawing the first rotation body () and the second rotation body () as one body; and a controller for controlling rotation of the first driving unit () and rotation of the second driving unit ().

Motion simulator with two degrees of freedom of angular motion

The objective of the present invention is to provide a motion simulator providing, to a link part, a buffering uniting part for absorbing impact during operation so as to prevent shaking of the motion simulator, thereby improving stability. To this end, the motion simulator of the present invention comprises: support members for supporting a chair on which a user sits, a monitor for providing images of a virtual environment according to the operation of the user, and a handle operated by the user for providing the virtual environment; and a plurality of link parts coupled to the lower portions of the support members so as to support the support members while simultaneously moving the same in the vertical direction, wherein at least one link part among the plurality of link parts are provided with buffering uniting parts for the absorption of impact.

The present disclosure relates to a motion simulator including a rotating plate, a fixing plate, an operating frame disposed at and spaced apart from an upper portion of the rotating plate, and a plurality of link units coupled between the rotating plate and the operating frame to support and vertically move the operating frame. The rotating plate has a motor mounted through one side thereof and a plurality of casters mounted through a lower surface thereof. The caster is configured such that, when the motion simulator is used, rotation of the caster is inhibited to allow the wheel to roll in the rotational direction of the rotating plate. When the motion simulator is moved, the caster can be unlocked to enable the caster to rotate and the motion simulator to be freely pushed and moved. The fixing plate enables the rotating plate to be rotated and has a driven part.

A tube-type light-emitting diode (LED) illumination lamp is provided. The tube-type LED illumination lamp includes at least one printed circuit board on which at least one LED is placed, and a heat dissipation cover that has at least one seating surface on which the printed circuit board is mounted. The seating surface is obliquely formed such that each printed circuit board is mounted on each inclined surface. According to the present invention, since a light diffusion angle is increased by obliquely positioning the printed circuit board on which the LED is placed, illuminance quality of the tube-type LED illumination lamp can be improved.

Tube-type LED illumination lamp

A temperature detection circuit of a semiconductor memory apparatus includes a fixed period oscillator, a temperature variable signal generating unit and a counting unit. The oscillator is configured to generate a fixed period oscillator signal when an enable signal is enabled. The temperature variable signal generating unit is configured to generate a temperature variable signal whose enable interval varies based on temperature variations, when the enable signal is enabled. The counting unit is configured to count the oscillator signal during the enable interval of the temperature variable signal to generate a temperature information signal.

Growing community of inventors

Gyeonggi-do, South Korea

Jong Chan Lee