Electronics and Telecommunications Research Institute

Jong-Bum You

Gyung-Ock Kim

Mi-Ran Park

Jeong-Woo Park

Provided is a semiconductor integrated circuit. The semiconductor integrated circuit includes a semiconductor pattern disposed on a substrate and including an optical waveguide part and a pair of recessed portions. The optical waveguide part has a thickness ranging from about 0.05 &#x3bc;m to about 0.5 &#x3bc;m. The recessed portions are disposed on both sides of the optical waveguide part and have a thinner thickness than the optical waveguide part. A first doped region and a second doped region are disposed in the recessed portions, respectively. The first and second doped regions are doped with a first conductive type dopant and a second conductive type dopant, respectively. An intrinsic region is formed in at least the optical waveguide part to contact the first and second doped regions.

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Seongnam, South Korea

Jong-Bum You