Korea Advanced Institute of Science and Technology

Gwangju Institute of Science and Technology

Jong-Bum You

Hyo-Hoon Park

Kyoungsik Yu

Hyeonho Yoon

Nam-Hyun Kwon

Jung Hoon Park

Ju-Beom Lee

Tae Joon Seok

In Ki Kim

Dong-Eun Yoo

Jun-Su Baek

Geumbong Kang

Disclosed are an optical phased array chip and a method of manufacturing the same. The optical phased array chip includes a plurality of optical switches and a plurality of optical phased arrays implemented on a single integrated circuit, wherein the single integrated circuit includes a silicon substrate, a lower layer formed on an upper portion of the silicon substrate, a silicon layer formed on an upper portion of the lower layer, a first upper layer, a second upper layer and a third upper layer sequentially arranged on the silicon layer, and an electrode that penetrates through the first upper layer while being grounded to the silicon layer and is formed on an upper portion of the first upper layer.

Optical phased array chip using MEMS switch and manufacturing method thereof

A device forming a photonic phased array antenna includes a low-refractive dielectric substrate, a nano-structured thin film formed on the low-refractive dielectric structure, and a high-refractive semiconductor waveguide formed over the low-refractive dielectric substrate and configured to operate in a single mode in the nano-structured thin film, wherein an antenna radiating a phase-modulated light wave to a free space is miniaturized to concentrate a radiated beam of a phased array antenna and to widen a scanning range.

Subminiature photo phased array antenna

Growing community of inventors

Daejeon, South Korea

Jong-Bum You