Entegris, Inc.

Jonathan W Dube

Scott A Laneman

Christopher Brown

Hitendra Patel

Keith Hao-Kiet Huynh

James M Stubbs

The disclosure provides a process for preparing solid tri(C-Calkyl)ammonium dihydrogen phosphates such as triethylammonium dihydrogen phosphate, in high yield, and in a free-flowing particulate form. The solid product advantageously possesses less than about 1500 ppm of aprotic organic solvents, less than about 1500 ppm of C-Calkanols, and less than about 500 ppm of water, as determined by Karl Fischer titration.

Process for preparing trialkylammonium dihydrogen phosphates

Provided is methodology for the preparation of highly-desired iodosilanes such as HSiIand HSi, via a reaction of alkylaminosilanes with certain substituted acid iodides. In one embodiment, bis(diethylamino)silane is reacted with benzoyl iodide to provide diiodosilane.

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Bowmanville, Canada

Jonathan W Dube