Measurement Specialties, Incorporated

Te Connectivity Services Gmbh

Jonathan Tran

Natasha V Kachenko

Vincent M Wong

Ting Gao

Miguel A Morales

Megan Hoarfrost Beers

Vishrut Vipul Mehta

Yilang Wu

A compressible element for a sensor assembly includes an elastomer matrix having a first compressibility and a plurality of closed areas distributed within the elastomer matrix and each surrounded by the elastomer matrix. Each of the closed areas has a second compressibility greater than the first compressibility.

Compressible element for a sensor assembly

A pressure sensing device includes a support structure, an isolated diaphragm, a working oil, and a MEMS die sensing element. The support structure defines a portion of a sealed cavity. The isolated diaphragm is mounted to the support structure. The isolated diaphragm has in inner side that defines an end of the sealed cavity and an outer side opposite the inner side. The working oil is contained within the sealed cavity. The MEMS die sensing element is enclosed within the support structure. The MEMS die sensing element is exposed to the working oil within the sealed cavity. A pressure exerted on the outer side of the isolated diaphragm by a fluid medium is transferred via the working oil to the MEMS die sensing element to measure the pressure of the fluid medium. The working oil has a low vapor pressure and a low volatility content.

Vacuum-resistant pressure sensing device

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Milpitas, CA, United States of America

Jonathan Tran