Nikon Corporation

Nikon Research Corporation of America

Jonathan Kyle Wells

Paul Derek Coon

Michael B Binnard

Matthew Rosa

Matthew D Rosa

Daniel Gene Smith

Eric Peter Goodwin

Stephen P Renwick

Steven Douglas Slonaker

Michel Pharand

Johnathan Marquez

Patrick S Chang

Brett William Herr

Pedro Reynoso-Mora

A position encoder for monitoring position of an object includes a target pattern, an illumination system, an image sensor, and a control system. The illumination system generates (i) a first illumination beam that is directed toward and impinges on the target pattern, the first illumination beam having a first beam characteristic; and (ii) a second illumination beam that is directed toward and impinges on the target pattern, the second illumination beam having a second beam characteristic that is different than the first beam characteristic. The image sensor is coupled to the object and is spaced apart from the target pattern. The image sensor senses a first set of information from the first illumination beam impinging on the target pattern and senses a second set of information from the second illumination beam impinging on the target pattern. The control system analyzes the first set of information and the second set of information to monitor the position of the object.

High-resolution position encoder with image sensor and encoded target pattern

A stage assembly for positioning a device along a first axis, the stage assembly comprising: a base; a stage that retains the device and moves above the base; a mover assembly that moves the stage along the first axis relative to the base; a first sensor system that monitors the movement of the stage along the first axis, the first sensor system generating a first signal, the first sensor system having a first sensor accuracy; a second sensor system that monitors the movement of the stage along the first axis, the second sensor system having a second sensor accuracy that is different from the first sensor accuracy of the first sensor system, the second sensor generating a second signal; and a control system that controls the mover assembly using at least one of the first sensor and the second signal.

Positioning system using surface pattern recognition and interpolation

A measuring device () for monitoring movement of a first object relative to a second object, the first object or the second object including a target surface (), comprises a first image sensor combination (), a second image sensor combination (), and a control system (A). The image sensor combinations () capture first images and second images of the target surface () over time. The first image sensor combination () includes a first image sensor (A) and a first lens assembly (B). The second image sensor combination () includes a second image sensor (A), and a second lens assembly (B) having a second optical axis (BX) that is at an angle of between thirty degrees and sixty degrees relative to normal to the target surface (). The control system (A) analyzes the first images and the second images to monitor movement of the first object relative to the second object.

Three-dimensional positioning system using surface pattern recognition and interpolation

An actuator assembly () for moving a device () includes a stator component (), a mover component (), a measurement system (), and a signal processor (). The measurement system () includes (i) a magnet assembly () that is coupled to and moves with the mover component (); and (ii) a plurality of spaced apart sensors (A). The magnet assembly () produces a magnetic field (B) that moves relative to the stator component () as the mover component () moves along a mover axis (C). Each sensor (A) is a transducer that generates a sensor signal that varies its output voltage in response to the changing magnetic field (B) from the magnet assembly () as the mover component () is moved relative to the sensors (A). The signal processor () receives the sensor signals and estimates a position of the mover component () along the mover axis (C) based at least in part on the sensor signals.

Actuator assembly including magnetic sensor system for vibrationless position feedback

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San Francisco, CA, United States of America

Jonathan Kyle Wells