Avago Technologies General IP (singapore) Pte. Ltd.

Avago Technologies International Sales Pte. Limited

Jonathan Kwadwo Abrokwah

Thomas Edward Dungan

Forest Dixon

John H Stanback

Nathan Perkins

Hans G Rohdin

Rick Snyder

Greg Halac

Robert G Long

William Snodgrass

Ricky Snyder

Scott A Rumery

Nate Perkins

Phil Marsh

Philbert Marsh

A transistor module includes a substrate; a transistor on the substrate; a dielectric layer disposed over the transistor and the substrate; a metal layer disposed over the dielectric layer and the transistor, the metal layer contacting a portion of the transistor; a metal pillar disposed over the metal layer; and a dielectric cushion disposed between the metal layer and the metal pillar over the transistor. The dielectric cushion includes dielectric material that is softer than the metal pillar, for reducing strain on semiconductor junctions when at least one of tensile or compressive stress is exerted on the metal pillar with respect to the substrate. The transistor module may further include at least one buttress formed between the metal layer and the substrate, adjacent to the transistor, for further reducing strain on the semiconductor junctions by providing at least one corresponding alternative stress path that substantially bypasses the transistor.

Semiconductor structure with strain reduction

A semiconductor structure is disclosed. The semiconductor structure includes an electrically conductive layer disposed over a substrate. A moisture barrier layer is disposed over the substrate and between the substrate and the electrically conductive layer. A dielectric layer is disposed over the moisture barrier layer. The dielectric layer has an elastic modulus that is lower than an elastic modulus of the moisture barrier layer.

Moisture barrier for semiconductor structures with stress relief

A semiconductor device that includes a Group III-V semiconductor substrate, circuit elements in and on the substrate, a first metal layer over the substrate, and an interlayer dielectric (ILD) layer. The ILD layer defines a via that extends through it to the first metal layer. Over the ILD layer is thick second metal layer and a passivation layer. The second metal layer includes an interconnect that extends through the via into contact with the first metal layer. The second metal layer is patterned to define at least one conductor. The passivation layer covers the second metal layer and the interlayer dielectric layer, and includes stacked regions of dielectric material. Ones of the regions under tensile stress alternate with ones of the regions under compressive stress, such that the passivation layer is subject to net compressive stress.

Passivation for group III-V semiconductor devices having a plated metal layer over an interlayer dielectric layer

A pseudomorphic high electron mobility transistor (pHEMT) comprises: a substrate comprising a Group III-V semiconductor material; buffer layer disposed over the substrate; and a channel layer disposed over the buffer layer. The buffer layer comprises microprecipitates of a Group V semiconductor element. A method of fabricating a pHEMT is also described.

Pseudomorphic high electron mobility transistor (pHEMT) comprising low temperature buffer layer

A pseudomorphic high electron mobility transistor (PHEMT) comprises a substrate comprising a Group III-V semiconductor material, a buffer layer disposed over the substrate, wherein the buffer layer comprises microprecipitates of a Group V semiconductor element and is doped with an N-type dopant, and a channel layer disposed over the buffer layer.

Pseudomorphic high electron mobility transistor comprising doped low temperature buffer layer

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Jonathan Kwadwo Abrokwah