Lam Research Corporation

Jonathan Keihl

Randall Hardin

Duane Lytle

Kevin G Herzog

A showerhead electrode is provided where backside inserts are positioned in backside recesses formed along the backside of the electrode. The backside inserts comprise a tool engaging portion. The tool engaging portion is formed such that the backside insert further comprises one or more lateral shielding portions between the tool engaging portion and the threaded outside diameter to prevent a tool engaged with the tool engaging portion of the backside insert from extending beyond the threaded outside diameter of the insert. Further, the tool engaging portion of the backside insert comprises a plurality of torque-receiving slots arranged about the axis of rotation of the backside insert. The torque-receiving slots are arranged to avoid on-axis rotation of the backside insert via opposing pairs of torque-receiving slots.

Anchoring inserts, electrode assemblies, and plasma processing chambers

An EDM spindle assembly is provided comprising a pull stud, an electrode holder, a fluid seal, and a seal holder. A threaded outside diameter of the seal holder is threadedly engaged with a threaded inside diameter of a counter bore formed in the tail end of the electrode holder. A threaded outside diameter of the pull stud is threadedly engaged with the threaded inside diameter of the counter bore. The threaded inside diameter of the counter bore in the electrode holder comprises a longitudinal threading dimension that is sufficient to accommodate the entire longitudinal threaded outside diameter of the seal holder and a portion of the longitudinal threaded outside diameter of the pull stud sufficient to create threaded engagement, with the fluid seal positioned in the seal accommodating space.

Growing community of inventors

Versailles, OH, United States of America

Jonathan Keihl