Massachusetts Institute of Technology

Bae Systems Information and Electronic Systems Integration Inc.

Jonathan K Tong

Gang Paul Chen

Chris L Willis

Svetlana Boriskina

Paul R Moffitt

Adam J Marcinuk

Xiaopeng Huang

James Loomis

Eugene M Lavely

Michael S Richman

Jonathan R Takahashi

Amrita V Masurkar

Yanfei Xu

A system and method for imaging a sample having a complex structure (such as an integrated circuit) implements two modes of operation utilizing a common electron beam generator that produces an electron beam within a chamber. In the first mode, the electron beam interacts directly with the sample, and backscattered electrons, secondary electrons, and backward propagating fluorescent X-rays are measured. In the second mode, the electron beam interrogates the sample via X-rays generated by the electron beam within a target that is positioned between the electron beam generator and the sample. Transmitted X-rays are measured by a detector within the vacuum chamber. The sample is placed on a movable platform to precisely position the sample with respect to the electron beam. Interferometric and/or capacitive sensors are used to measure the position of the sample and movable platform to provide high accuracy metadata for performing high resolution three-dimensional sample reconstruction.

Nondestructive sample imaging

Infrared-transparent visible-opaque fabrics for wearable personal thermal management.

Infrared transparent visible opaque fabrics

Growing community of inventors

Cambridge, MA, United States of America

Jonathan K Tong