National Technology & Engineering Solutions of Sandia, LLC

Jonathan Joseph Coleman

Robert K Grubbs

Adam M Rowen

Christian Lew Arrington

Amber Lynn Dagel

Andrew E Hollowell

Jamin Ryan Pillars

Carlos R Perez

Kyle Chris Klavetter

Kalin Baca

Christopher St John

A coating made of platinum-gold alloy is provided, together with a method of its preparation by electrodeposition. The alloy is composed of more than 50 atomic percent platinum. The microstructure of the alloy consists of generally ellipsoidal grains. More than half of the grains have a major axis of 10 nm or less.

Electrodeposited platinum-gold alloy

A method is provided for subtractively processing a layer of etchable material formed over an electrically conductive surface region of a workpiece. The workpiece is immersed in a liquid solution, generally but not exclusively a conductive solution, that comprises an etchant for the etchable material, so that etching of the etchable material is initiated. An electric circuit is connected to include a control electrode, a reference electrode, and the electrically conductive surface region of the workpiece. The electric circuit is used to monitor the development process dynamically at each of a plurality of intervals during the etching. The etching is terminated when the electrochemical signal satisfies a criterion indicating that the etching is complete.

Enhanced microfabrication using electrochemical techniques

A method for electroplating a nonmetallic grating including providing a nonmetallic grating; performing an atomic layer deposition (ALD) reaction to form a seed layer on the nonmetallic grating; and electroplating a metallic layer on the seed layer such that the metallic layer uniformly and conformally coats the nonmetallic grating. An apparatus including a silicon substrate having gratings with an aspect-ratio of at least 20:1; a atomic layer deposition (ALD) seed layer formed on the gratings; and an electroplated metallic layer formed on the seed layer, wherein the electroplated metallic layer uniformly and conformally coats the gratings.

Electroplated Au for conformal coating of high aspect ratio silicon structures

Electroplated AU for conformal coating of high aspect ratio silicon structures

Growing community of inventors

Albuquerque, NM, United States of America

Jonathan Joseph Coleman