Dcg Systems Gmbh

Credence Systems Corporation

Edison Nation, LLC

Isothermal Systems Research, Inc.

Fei Efa, Inc.

Jonathan Frank

Tahir Cader

Charles Lester Tilton

Thomas Wong

George Joseph Wos

Daniel Murdoch Cotton

Benjamin Hewett Tolman

Alan Brent Roberts

John Eric Hanson

Dario Meluzzi

Ian Kovacevich

Lawrence R Ober

Prasad Sabbineni

Rick Portune

An optics arrangement for a solid immersion lens (SIL) is disclosed. The arrangement enables the SIL to freely tilt. The arrangement includes a SIL having an optical axis extending from an engaging surface and a rear surface of the SIL; a SIL housing having a cavity configured to accept the SIL therein while allowing the SIL to freely tilt within the cavity, wherein the cavity includes a hole positioned such that the optical axis passes there-through, to thereby allow light collected by the SIL to propagate to an objective lens; and, a SIL retainer attached to the SIL housing and configured to prevent the SIL from exiting the cavity.

Self correcting floating SIL tip

A micro-spray cooling system beneficial for use in testers of electrically stimulated integrated circuit chips is disclosed. The system includes micro-spray heads disposed about a probe head. The spray heads and probe head are disposed in a sealed manner inside a spray chamber that, during operation, is urged in a sealing manner onto a sealing plate holding the integrated circuit under test. The atomized mist cools the integrated circuit and then condenses on the spray chamber wall. The condensed fluid is pumped out of the chamber and is circulated in a chiller, so as to be re-circulated and injected again into the micro-spray heads. The pressure inside the spray chamber may be controlled to provide a desired boiling point.

Spray cooling thermal management system and method for semiconductor probing, diagnostics, and failure analysis

An automated vehicle includes a vehicle body, a power source, one or more motors housed within the vehicle body and in operable connection with the power source, running gear in operable connection with the one or more motors for facilitating movement and supporting the vehicle body upon a surface, and an optical system. The optical system includes an optical sensor for detecting light reflected from the surface and generating an output in response to the light reflected, and one or more light sources, each light source capable of projecting light on the surface. Furthermore, the optical system is configured to regulate an amount of power supplied to the one or more motors in response to the output generated by the optical sensor.

Automated vehicle and system utilizing an optical sensing system

An automated vehicle includes a vehicle body, a power source, one or more motors, running gear for facilitating movement, and an optical system. The one or more motors are housed within the vehicle body and are in operable connection with the power source, and the running gear are in operable connection with the one or more motors. The optical system includes one or more optical sensors positioned generally at an underside of the vehicle body. The one or more optical sensors are configured to generate an output in response to a path. The optical system is configured to regulate an amount of power supplied to the one or more motors in response to the output generated by the one or more optical sensors.

A collection optics arrangement integrating an objective lens and a solid immersion lens. An objective lens housing has an objective lens mounted inside. A solid immersion lens (SIL) housing is slidably mounted onto said objective lens housing, and a solid immersion lens is mounted onto the SIL housing. A spring imparts resilient force resisting the sliding of the solid immersion lens housing with respect to the objective lens housing.

Collection optics integrating an objective and a SIL

An apparatus and method are disclosed for hard-docking of a tester head to a DUT, while permitting the angular alignment of a specimen to be inspected to the optical axis of an optical testing tool. In one example, a system for orthogonal alignment of a specimen to an optical axis of a collection optics is provided. The system comprises a self-leveling tabletop; a specimen holder coupled to the tabletop and held at a fix orientation; collection optics coupled to the tabletop; a plunger coupled to the tabletop and operable to maintain the leveling orientation of the tabletop; a control valve sensing the leveling orientation of the tabletop and coupled to the plunger to control the operation of the plunger; and an aligner coupled to the tabletop and operable to change the alignment of the optical axis of the collection optics with respect to the specimen without changing the fixed orientation of the specimen holder.

Apparatus and method for hard-docking a tester to a tiltable imager

A system for orthogonal alignment of a specimen disclosed. The system includes a light-beam illumination source, collection optics, imaging optics, and a tiltable specimen holder. The light-beam source is activated to illuminate a spot on the specimen, and the imaging optics is used image that spot. The location of the spot on the imager is used to determine whether the specimen is orthogonal to the optical axis of the collection optics.

Light beam apparatus and method for orthogonal alignment of specimen

A landing system is provided for accurate placing of collection optics in a microscope. In one example, a solid immersion lens (SIL) is used for light collection, and the landing system is operated to place the SIL in contact with an IC. A proximity sensor is used for determining the SIL's position with respect to the IC. The arrangement is attached to a z-motion stage. During the placement procedure, the navigation is performed in steps and at each step the compression of the SIL is measured relative to its uncompressed state. When a measured compression exceeds a preset threshold, a SIL landing is recognized. In one example, after a landing is recognized, a further compression is imparted to the SIL in order to place the SIL in a focusing distance to the objective lens.

Optics landing system and method therefor

A landing system is provided for accurate placing of collection optics in a microscope. In one example, a solid immersion lens (SIL) is used for light collection, and the landing system is operated to place the SIL in contact with an IC. A proximity sensor is used for determining the SIL's position with respect to the IC. The proximity sensor is attached to a z-motion stage. During the placement procedure, the navigation is performed in steps and at each step the compression of the SIL is measured relative to its uncompressed state. When a measured compression exceeds a preset threshold, a SIL landing is recognized. In one example, after a landing is recognized, a further compression is imparted to the SIL in order to place the SIL in a focusing distance to the objective lens.

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Los Gatos, CA, United States of America

Jonathan Frank