Brooks-pri Automation, Inc.

Jonathan E Borkowski

Rodney Charles Ow

Abdul Ghafar

Rafael Gomez

Kay Coghlan

Andres Cannavo

A modular frame assembly for a wafer fabrication system comprising at least one base casting and at least one upstanding pod door opening casting. The at least one base casting and at least one upstanding pod door opening casting are self registering and allow frames for wafer fabrication systems of any normally desired configuration to be produced out of a small number of cast modules. More specifically, in a preferred embodiment, frames configured to mate with one to four commercially available loaders may be readily assembled out of the aluminum castings.

Growing community of inventors

San Jose, CA, United States of America

Jonathan E Borkowski