Texas Instruments Corporation

Reflectivity, Inc.

Reflectvity, Inc

Jonathan Clayton Doan

Satyadev R Patel

Andrew Gerrit Huibers

Dmitri Simonian

James C Dunphy

Robert M Duboc

Hongqin Shi

Jianglong Zhang

Regis Grasser

Peter Heureux

Terry Tarn

Peter W Richards

Jason S Reid

Igor Volfman

A screen for use in image presentations comprises an array of transmissive elongated prisms. The screen is capable of delivering incident light, having an incident angle within a specific incident angle range, to the viewing area, while preventing ambient light, having an incident angle within another angle range, from being directed to the viewing area. According to one embodiment, in operation, the screen, an image source, and the viewing area are positioned such that the light from the image source is directed to the viewing area.

Display screen for use in front projectors

A micromirror device and a method of making the same are disclosed herein. The micromirror device comprises a mirror plate, hinge, and post each having an electrically conductive layer. One of the hinge, mirror plate, and post further comprises an electrically insulating layer. To enable the electrical connections between the conducting layers of the hinge, mirror plate, and post, the insulating layer is patterned.

Method of fabricating micromirror device

The invention provides a method and apparatus for evaluating the quality of microelectromechanical devices having deformable and deflectable members using resonation techniques. Specifically, product quality characterized in terms of uniformity of the deformable and deflectable elements is inspected with an optical resonance mapping mechanism on a wafer-level.

Characterization of micromirror array devices using interferometers

The present invention discloses a method for processing a deformable element of a microstructure for reducing the plastic deformation by oxidizing the deformable element. The method of the present invention can be performed at a variety of stages of the fabrication and packaging processes.

Pre-oxidization of deformable elements of microstructures

Disclosed herein is a micromirror device having in-plane deformable hinge to which a deflectable and reflective mirror plate is attached. The mirror plate rotates to different angles in response to an electrostatic field established between the mirror plate and an addressing electrode associated with the mirror plate.

Micromirror device and method for making the same

Disclosed herein is a microelectromechanical device having a structural layer composed of a low stress TiNlayer and a method of making the same.

[object Object]

To protect the structural layers from being eroded in the etching process, a protection layer is deposited on the exposed structural layers of the micromirror. The protection layer is deposited before etching and removed after etching.

Protection layers in micromirror array devices

Electrical connections in microelectromechanical devices

A microstructure is packaged with a device substrate of the microstructure being attached to a package substrate. For dissipating possible deformation of the microstructure, which may result in device failure or quality degradation of the microstructure, an adhesive material comprising a compliant adhesive component is applied and positioned between the device substrate and package substrate.

Micromirror array device with compliant adhesive

Disclosed herein is method of operating a device that comprises an array of micromirrors. The method comprises a process usable for repairing stuck micromirrors of the micromirror array during the operation. The reparation process applies, at the ON state, two consecutive refresh voltages to the mirror plates of the micromirrors in the array with the pulses being separated in time longer than the characteristic oscillation time of the micromirrors. The reparation process can be applied independently to the micromirrors. Alternatively, the reparation process can be incorporated with a bias inversion process.

Optical coating on light transmissive substrates of micromirror devices

Micromirror devices with in-plane deformable hinge

A microelectromechanical device with a plastically deformable element of is exposed to illumination light so as to elongate the lifetime of the device on the customer side.

Lifetime improvement in microstructures with deformable elements

A microstructure and the method for making the same are disclosed herein. The microstructure has structural members, at least one of which comprises an intermetallic compound. In making such a microstructure, a sacrificial material is employed. After completion of forming the structural layers, the sacrificial material is removed by a spontaneous vapor phase chemical etchant.

Microelectromechanical structure and a method for making the same

A method for processing microelectromechanical devices is disclosed herein. The method prevents the diffusion and interaction between sacrificial layers and structure layers of the microelectromechanical devices by providing selected barrier layers between consecutive sacrificial and structure layers.

Growing community of inventors

San Jose, CA, United States of America

Jonathan Clayton Doan