Leland Stanford Junior University

Jonathan A Fan

Jianji Yang

David Sell

Thaibao Phan

James D Plummer

Kai Zhang

Xue Bai Pitner

Evan W Wang

Mingkun Chen

Jiaqi Jiang

Certain examples are directed to methods for detection of anomalies in semiconductor thin-film materials, such as strains, defects and the like, that may precipitate defects in semiconductor processing steps and may adversely impact device and system-level functionality, processing, and yields. Certain methods use filtering optics to provide a set of filter-separated light beams respectively associated with different polarization states of polarized light directed towards a semiconductor-related material sample, and providing a set of sample-characterizing response data based on factors such as sets of polarization-state values, different wavelengths associated with the polarization states, and/or light-incidence angles characterizing separation of the different polarization states. Based on these factors, the types and severities of such anomalies may be analyzed and the related defects remedied.

Matrix-based characterization and measurements for semiconductor thin-film material

Certain examples are directed to optical elements or devices that pass or process the light based on a set of connectable metasurface elements having been topology optimized. The connectable metasurface elements are independently optimized or designed to have each section having its own metasurface phase profile corresponding to a desired phase profile. In this way, such devices need not be designed or manufactured by importing a large number of results into simulation efforts, thereby realizing significant saving in terms of optimization time and computational power.

High-efficiency, large-area, topology-optimized metasurfaces

A method for optimization of photonic devices is disclosed. The method includes receiving a set of unconstrained latent variables; mapping the set of unconstrained latent variables to a constrained space to generate a constrained device; calculating the permittivity across each element of the constrained device; determining a permittivity-constrained width gradient based at least partially on the permittivity across each element; and optimizing the set of unconstrained latent variables by at least partially using the permittivity-constrained width gradient.

Multi-objective, robust constraints enforced global topology optimizer for optical devices

Various embodiments are directed to an apparatus and methods of forming and/or using an apparatus comprising a plurality of device components. An example method includes geometrically optimizing a periodic or aperiodic device comprising a plurality of device components by optimizing a topology, for each device component, from a starting point to have particular optical properties for a particular optical response. Each device component includes a plurality of geometric structures. The optimization includes selecting the starting point for a continuous profile to have the particular optical properties for the particular optical response, iteratively converging the continuous profile to a discrete profile, and, while iteratively converging to the discrete profile, adjusting edges between boundaries of the device components by accounting for fabrication constraints.

Device components formed of geometric structures

A single-crystalline metal is created on a substrate by liquefying a metal material contained within a crucible while in contact with a surface of the substrate, cooling the metal material by causing a temperature gradient effected in the substrate in a direction that is neutral along the surface of the substrate and, therein, growing the single-crystalline metal in the crucible.

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Palo Alto, CA, United States of America

Jonathan A Fan