Trumpf Laser- Und Systemtechnik Gmbh

Jonas Kleiner

Daniel Flamm

Malte Kumkar

Daniel Grossmann

Myriam Kaiser

Henning Rave

A method for laser processing a workpiece is provided. The workpiece includes a material transparent to a laser beam of the laser processing. The method includes splitting an input laser beam by using a beam splitter into a plurality of partial beams. The splitting of the input laser beam is performed by application of phases to a beam cross section of the input laser beam. The method further includes focusing the plurality of partial beams decoupled from the beam splitter by using a focusing optical unit. Multiple focus elements are formed by the focusing of the plurality of partial beams. The method further includes subjecting the material of the workpiece to at least a subset of the multiple focus elements. The application of the phases is performed in such a way that at least two of the multiple focus elements have different intensities.

Method and device for laser processing a workpiece

A processing optical unit for workpiece processing includes a birefringent polarizer configured to split at least one input laser beam into a pair of partial beams polarized perpendicularly to one another. The processing optical unit further includes a focusing optical unit arranged downstream of the birefringent polarizer in the beam path and configured to focus the pair of partial beams onto focus zones in a focal plane. The processing optical unit is configured to produce at least partly overlapping focus zones of the pair of partial beams.

Processing optical unit, laser processing apparatus and method for laser processing

A method for separating a workpiece along a separation line by using ultrashort laser pulses of a laser beam includes splitting the laser beam, using a beam splitter optical unit, into a plurality of partial laser beams. Each partial laser beam is focused by a focusing optical unit onto a surface and/or into a volume of the workpiece so that the partial laser beams are arranged next to one another and spaced apart from one another along the separation line. The method further includes implementing material ablation in the workpiece along the separation line by introducing the ultrashort laser pulses into the workpiece. The partial laser beams are repeatedly moved away from an initial position along the separation line by a deflection value and are subsequently moved back into the initial position. The deflection value is less than or equal to a distance between two adjacent partial laser beams.

Method for separating a workpiece

For material processing of a material, which is in particular for a laser beam to a large extent transparent, asymmetric shaped modifications are created transverse to the propagation direction of the laser beam. Thereby, the laser beam is shaped for forming an elongated focus zone in the material, wherein the focus zone is such that it includes at least one intensity maximum, which is transverse flattened in a flattening direction, or a transverse and/or axial sequence of asymmetric intensity maxima, which are flattened in a sequence direction. After positioning the focus zone in the material, a modification is created and the material and the focus zone are moved relative to each other in the or across to the flattening direction or in the or across to the sequence direction for forming a crack along an induced preferred direction.

System for asymmetric optical beam shaping

An optical system for shaping a laser beam includes a beam shaping element configured to receive the laser beam having a transverse input intensity profile and to impose a beam shaping phase distribution onto the laser beam. The optical system further includes a near field optical element, arranged downstream of the beam shaping element at a beam shaping distance and is configured to focus the laser beam into the focus zone. The imposed phase distribution results in a virtual optical image of the elongated focus zone located before the beam shaping element. The beam shaping distance corresponds to a propagation length of the laser beam within which the imposed phase distribution transforms the transverse input intensity profile into a transverse output intensity profile at the near field optical element.

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Ditzingen, Germany

Jonas Kleiner