Pfeiffer Vacuum Gmbh

Pfeiffer Vacuum Technology Ag

Jonas Becker

Jan Hofmann

Heiko Schaefer

Wolfgang Soehngen

Sebastian Oberbeck

Michael Willig

Bernd Koci

Stefan Kallenborn

Verena Wangorsch

Lars Pauli

Gernot Bernhardt

Sebastian Latta

Maik Schaefer

Wolfgang Söhngen

Erhard Harapat

Maik SCHÄFER

Jannik Germann

Jonas SÖHNGEN

Heiko SCHÄFER

Gabriel Bergmann

Herbert Stammler

Ulrich Emrich

Jörn TÖNNISSEN

A vacuum pump in accordance with the invention, in particular a scroll vacuum pump, comprises a first spiral element that has a first wall that extends spirally about a first axis, that extends in an axial direction from a first support, and that has a first free end face facing away from the first support, and a second spiral element that has a second wall that extends spirally about a second axis, that extends in the axial direction from a second support, and that has a second free end face facing away from the second support, wherein the first spiral element and the second spiral element are movable relative to one another and are arranged such that the first wall and the second wall sealingly engage into one another while forming pumping spaces, wherein the free end face of at least one of the walls has a recess, in particular a groove, which extends in a longitudinal direction of the wall and in which at least one seal is movably arranged, and wherein the recess is laterally bounded by at least one inner wall that extends at least sectionally, preferably continuously, obliquely to the axial direction and that is configured to cooperate with a side wall of the seal extending at least sectionally, preferably continuously, obliquely to the axial direction.

Vacuum pump with movable trapezoidal seal

The invention relates to a scroll pump comprising a pressure sensor integrated into the scroll pump.

Vacuum pump, scroll pump, and manufacturing method for such

The invention relates to a recirculation device for a gas of a process device, said recirculation device comprising a recirculation pump, wherein the recirculation pump is a side channel pump.

Gas recirculation device and system having such a device

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Wettenberg, Germany

Jonas Becker