Sporian Microsystems, Inc.

Jon Lubbers

Evan Pilant

Kevin Harsh

Brian Schaible

Jakob Oreskovich

Steve Sheeran

Eric Schneider

Aris Legorreta

Laura Ferlin

Thomas Schahrer

Lewis Wright

Samuel Hotaling

Yiping Liu

Laura Rodrigues

Laurel Frediani

Alex Brand

Brady Knowles

Heat resistant sensors equipped with any of a variety of transducers for measuring any of a variety of properties of fluids are constructed with components comprising materials that can withstand very high temperatures. Some embodiments of the sensors include a first pressure sensitive element and a second pressure sensitive element with respective first and second membranes positioned in juxtaposed relation to each other to form a capacitor. Some embodiments include a pusher that extends from the membrane toward a first electrode. Some embodiments have a housing comprising a ceramic substrate with a sensor element mounted on an inside surface of the substrate. Other embodiments have direction sensing capabilities including a heater positioned in a core material and at least three temperature sensors located at or near the peripheral surface of the core material and spaced apart angularly in relation to each other.

Compact pressure and flow sensors for very high temperature and corrosive fluids

Heat resistant sensors equipped with any of a variety of transducers for measuring any of a variety of properties of fluids are constructed with components comprising materials that can withstand very high temperatures. Some embodiments of the sensors include a base comprising non-conductive ceramic material, and some embodiments of the transducers include conductive ceramic materials with resistivities that vary as a function of temperature. Some embodiments of the sensors also include electrical conductors comprising electrically conductive ceramic material or electrical conductors comprising an electrically conductive refractory metal on the base. Other embodiments of the transducers include a capacitor constructed of materials that can withstand very high temperatures.

Heat resistant sensors for very high temperature conditions

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Lafayette, CO, United States of America

Jon Lubbers