Asml Netherlands B.v.

Nordson Corporation

Jon David Tedrow

David Bessems

Colin Michael Odneal

William L Hassler, Jr

Patrick T Hogan

Robert James Wright

Joshua Mark Lukens

Serkan Kincal

Sandeep Rai

Petrus Adrianus Willems

Abhiram Lakshmi Ganesh Govindaraju

Wei-Hsun Chen

Patrick Hogan

Disclosed is a connector for connecting one fluid handling device () such as a conduit to another fluid handling device () such as another conduit in which the faces of fittings () attached to glands () in the connector are given complementary mating configurations () so they can mesh that lack circular symmetry so that the faces do not rotate with respect to one another when the faces are subjected to torque when a connection is being made.

Anti-rotation fluid connection

An apparatus for supplying a target material includes a reservoir system, a priming system, and a transport system that extends from the priming system to the reservoir system. The reservoir system includes a reservoir in fluid communication with a nozzle supply system. The priming system includes a priming chamber defining a primary cavity; and a removable carrier configured to be received in the primary cavity. The removable carrier defines a secondary cavity configured to receive a solid matter that includes the target material. The transport system is configured to provide a fluid flow path between the priming system and the reservoir system.

Target material supply apparatus and method

Provided is an apparatus that includes a first reservoir system including a first fluid reservoir configured to be in fluid communication with a nozzle supply system during operation of the nozzle supply system, a second reservoir system including a second fluid reservoir configured to be, at least part of the time during operation of the nozzle supply system, in fluid communication with the first reservoir system, a priming system configured to produce a fluid target material from a solid matter, and a fluid control system fluidly connected to the priming system, the first reservoir system, the second reservoir system, and the nozzle supply system. The fluid control system is configured to, during operation of the nozzle supply system: isolate at least one fluid reservoir and the nozzle supply system from the priming system, and maintain a fluid flow path between at least one fluid reservoir and the nozzle supply system.

Target material control in an EUV light source

A conduit suitable for use in a high temperature, high pressure environment, the conduit having an elongate portion made of a first refractory metal and a fitting portion made of a second refractory metal attached to an axial end of the elongate portion. The attachment may be made by welding and the second refractory metal may have a greater yield strength than the first refractory metal.

Apparatus for high pressure connection

A coupling arrangement including a first fitting, a second fitting, and a rotational coupler which when turned presses the first fitting against the second fitting, in which the fittings engage rotationally to inhibit relative rotation of the fittings. For example, one of the fittings may have protrusions and the other fitting may have recesses arranged to receive the protrusions.

Anti-rotation coupling

A vessel having a seal that is protected from the liquid material within the vessel by a volume of gas. The vessel has a partition that divides the vessel into two volume spaces such that the seal that is in gaseous communication with the first volume space is protected from the liquid material in the second volume space by a volume of gas in the first volume space.

Methods and apparatuses for protecting a seal in a pressure vessel of a photolithography system

An applicator for dispensing a liquid conformal coating material onto a substrate. The applicator includes a body assembly with a liquid flow passage having a liquid inlet adapted to receive the coating material and a liquid outlet. A valve seat is positioned between the liquid flow passage and the liquid outlet. A valve stem is mounted in the body assembly for reciprocating movement between an open position and a closed position. The valve stem includes a first end and a second end. The first end of the valve stem engages the valve seat in the closed position to stop flow of the liquid coating material through the outlet and disengages from the valve seat in the open position to allow flow of the liquid coating material through the outlet. A valve actuating mechanism is operative to move the valve stem from the open position to the closed position and is further operative to move the valve stem from the closed position to the open position. A resilient dampening element is operatively coupled between part of the body assembly and the valve stem. The resilient dampening element provides a biasing force against the valve stem as the valve stem moves from the closed position to the open position to reduce rebounding movement of the valve stem toward the closed position.

Conformal coating applicator and method

An apparatus for dispensing a viscous material includes a dispenser body having an inlet and a discharge orifice. A valve element is mounted for movement in the dispenser body between an open position allowing flow from the discharge orifice, and a closed position preventing flow therefrom. An actuator is coupled to the valve element for actuation between the open and closed positions. A heat exchanger having a serpentine passage and a heater is coupled thereto, wherein the heater is in thermal communication with the dispenser body. The passage is configured to deliver the viscous material to the inlet at a uniform temperature. A method of dispensing a viscous material includes positioning a heat exchanger, having a fluid passage and a heater, in thermal communication with the dispenser body, and heating the material flowing through the fluid passage to a uniform temperature prior to delivering it to the inlet.

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San Diego, CA, United States of America

Jon David Tedrow