Varian Semiconductor Equipment Associates, Inc.

Other

Praxair Technology, Inc.

Jon Ballou

James Paul Buonodono

Costel Biloiu

Joseph C Olson

Kevin M Daniels

David G Wilson

Ernest E Allen

Joseph P Dzengeleski

Manny Sieradzki

Jeannot Morin

August O Westner

Francis J Porter

In one embodiment, an ion extraction optics for extracting a plurality of ion beams is provided. The ion extraction optics may include, an extraction plate, the extraction plate defining a cut-out region, the cut-out region being elongated along a first direction. The extraction apparatus may include a slidable insert, the slidable insert disposed to overlap the cut-out region, and slidably movable with respect to the extraction plate, along the first direction, wherein the slidable insert and cut-out region define a first aperture and a second aperture.

Extraction apparatus and system for high throughput ion beam processing

A processing apparatus including a process chamber, a plasma source disposed within the process chamber, wherein the plasma source is movable in a first direction and is configured to emit an ion beam along a second direction that is orthogonal to the first direction. The apparatus may further include a platen disposed within the process chamber for supporting a substrate, and an ion beam current sensor that is disposed adjacent to the platen.

Processing apparatus and method of treating a substrate

An electrode adjustment method and apparatus are disclosed for use in workpiece processing. The assembly may include an electrode assembly having first and second ends. First and second manipulators may be coupled to the first and second ends. The manipulators may be used to selectively impart movement to the first and second ends of the electrode assembly to adjust one or more properties of an ion beam passing through the electrodes. The first and second manipulators may be independently actuatable so that the first and second ends of the electrode can be adjusted independent of one another. Methods of using the disclosed apparatus are also disclosed.

Double ended electrode manipulator

An exemplary embodiment disclosed herein relates to an articulatable sealing device. The device includes a plurality of seal elements each of which is urgable against a seal-surface, a fixing member tightenable about a perimeter of the seal elements, and a retractor in operable communication with the plurality of seal elements and able to move the plurality of seal elements in a desired direction.

Intermittent sealing device

A tonometer for measuring intraocular pressure of an eye is described. The tonometer includes an eyepiece having a conduit extending through an outer surface. The outer surface is concave shaped to conform to an eyeball. The tonometer also includes a plunger extending through the conduit having a head at a first end and having a probe at a second end which extends beyond the outer surface of the eyepiece so as to contact the eyeball when the eyepiece is positioned to conform to the eyeball. The tonometer also includes a fluid reservoir having a top and a bottom. The bottom of the reservoir is sealed by a membrane that is in juxtaposition with the head of the plunger. In addition, the tonometer includes an indicator positioned in the fluid reservoir for measuring a level of fluid in the reservoir. The level of fluid in the reservoir is proportional to an intraocular pressure of the eyeball when the eyepiece is positioned to conform to the eyeball.

Tonometer utilizing hydraulic pressure

Growing community of inventors

Beverly, MA, United States of America

Jon Ballou