Nikon Corporation

Johnathan Marquez

Michael B Binnard

Daniel Gene Smith

Chetan Mahadeswaraswamy

Paul Derek Coon

Patrick S Chang

Brett William Herr

Joseph P Rossi

Eric Peter Goodwin

Stephen P Renwick

Steven Douglas Slonaker

Michel Pharand

Matthew Rosa

Jonathan Kyle Wells

Motofusa Ishikawa

Matthew Parker-McCormick Bjork

Matthew D Rosa

Heather Lynn Durko

3D metrology techniques are disclosed for determining a changing topography of a substrate processed in an additive manufacturing system. Techniques include fringe scanning, simultaneous fringe projections, interferometry, and x-ray imaging. The techniques can be applied to 3D printing systems to enable rapid topographical measurements of a 3D printer powder bed, or other rapidly moving, nearly continuous surface to be tested. The techniques act in parallel to the system being measured to provide information about system operation and the topography of the product being processed. A tool is provided for achieving higher precision, increasing throughput, and reducing the cost of operation through early detection and diagnosis of operating problems and printing defects. These techniques work well with any powder bed 3D printing system, providing real-time metrology of the powder bed, the most recently printed layer, or both without reducing throughput.

Metrology for additive manufacturing

A position encoder for monitoring position of an object includes a target pattern, an illumination system, an image sensor, and a control system. The illumination system generates (i) a first illumination beam that is directed toward and impinges on the target pattern, the first illumination beam having a first beam characteristic; and (ii) a second illumination beam that is directed toward and impinges on the target pattern, the second illumination beam having a second beam characteristic that is different than the first beam characteristic. The image sensor is coupled to the object and is spaced apart from the target pattern. The image sensor senses a first set of information from the first illumination beam impinging on the target pattern and senses a second set of information from the second illumination beam impinging on the target pattern. The control system analyzes the first set of information and the second set of information to monitor the position of the object.

High-resolution position encoder with image sensor and encoded target pattern

A stage assembly () that moves a device () includes a stage () that retains the device (), a base (), a stage mover assembly (), and a supply system (A). The supply system (A) is secured to and positioned on the stage (). The supply system (A) includes a circulation system () that circulates a circulation fluid () through a circulation conduit (D) in the stage () to control the temperature of the stage () and the device (). The circulation system () can include a storage container assembly (A) that defines a supply chamber () that supplies pressurized circulation fluid () to the circulation conduit (D), a return chamber () that receives the circulation fluid () that was circulated through the circulation conduit (D), a movable piston () that separates the supply chamber () from the return chamber (), and a piston urger () that urges the piston () to move to reduce the supply volume of the supply chamber () and urge the circulation fluid () out of the supply chamber ().

On-board supply system for a stage assembly

A rotary probe head having a dual interface for probe mounting that allows two separate interfaces to be mounted on opposite sides of the 'A' or elevation axis of the rotary probe head. The two interfaces can be rotatable and interchangeable and allow for increased flexibility in handling different types of attachments including attachments having widely different mass, size, and/or interface connections. A probe can be mounted to one interface and a counterweight can be mounted to the opposite interface for improved holding torque performance by reducing the duty force and heat factor generation of the motor in the probe head.

Rotary probe head

Growing community of inventors

San Diego, CA, United States of America

Johnathan Marquez