Irvine Sensors Corporation

Microsensors Corp.

John William Reeds, Iii

Ying Wen Hsu

Christ H Saunders

Phu Cu Dao

Disclosed is a MEMS sensor including a sense element and a single anchor that supports the sense element arranged in a central hub-like fashion that reduces the effects of thermal stress. Usually, two or more anchors are required to suitably constrain the sense element's motion. The anchor disclosed herein, however, supports the sense element with connection elements having a connection geometry that substantially limits the motion of the sense element to a single-degree-of-freedom. The connection elements may include, for example, converging flexures, an extender bar, or both.

MEMS sensor with single central anchor and motion-limiting connection geometry

A micro-gyro device is disclosed combining an element which oscillates around the drive axis and an element which rocks around the output axis, so arranged that Coriolis force is transmitted from one element of the other without any substantial transfer of motion of either element to the other in its own direction of motion. In other words, the masses of the two elements operate independently of one another, providing improved performance, and individual adjustability to compensate for any manufacturing imprecision. The presently-preferred device combines an outer ring which oscillates around the drive axis with an inner disk which rocks around the output axis, whenever external rotating motion occurs about the rate axis.

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San Juan Capistrano, CA, United States of America

John William Reeds, Iii