Cvi Incorporated

John William Bonn

Cryopump apparatus for evacuating very large chambers to ultra high vacuums includes cryogenic panels alternating with radiation shields having a unique Z-configuration which optically blind the panels. The panels and shields are supported by and housed within structure having specific components slidable along one another to thereby permit necessary movement of the components when the apparatus is subjected to cool-down or warm-up. The apparatus is characterized by very high pumping speeds and is capable of cryopumping from both sides thereof.

Cryopump apparatus

System includes a closed housing having a plurality of rectangularly configured beds with perforate sidewalls longitudinally disposed in housing in laterally spaced disposition with each other. Alternate spaces at inlet end are closed and alternate spaces opposite the open ends are closed at exit end whereby contaminated gas is laterally squeezed through the beds filled with particulate adsorbent. The lower portions of the beds funnel into longitudinally extending discharge chutes enclosed within respective wells, the lower edges of the chutes rising at a constant angle above the well floor. An evacuation system coupled to the wells suctions the pile of particulate from the most remote portion of the chutes first.

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Columbus, OH, United States of America

John William Bonn