Innovative Micro Technology

Optical Coating Laboratory, Inc.

John Wesley Stocker

John Stuart Foster

Paul Rubel

Jeffery Frank Summers

Richard Thomas Martin

Patrick Edward Feierabend

Andrew Dexter Wallis

Bryant P Hichwa

Kimon Rybnicek

Tara Jean Rybnicek

The invention describes a method and apparatus for deploying micromachined actuators in a plane which is orthogonal to the original fabrication plane of the devices. Using batch-processing, photolithographic procedures known in the micromachined electro-mechanical system (MEMS) art, a plurality of devices is constructed on a suitable substrate. The devices are then separated one from another by sawing and dicing the original fabrication wafer. The devices are rotated into an orthogonal orientation and affixed to a second wafer. The second wafer also contains circuitry for addressing and manipulating each of the devices independently of the others. With this method and apparatus, arrays of actuators are constructed whose plane of actuation is perpendicular to the plane of the array. This invention is useful for constructing N&#xd7;M fiber optic switches, which direct light from N input fibers into M output fibers.

Method and apparatus for assembling an array of micro-devices

A surface micromachined micromagnetic actuator is described, wherein rotary actuation is accomplished by a member pivotably mounted on the surface of the substrate. Angular motion of the member about the pivot point is imparted by the interaction of a magnetic tab affixed to the member, with flux generated in the gap of an electromagnetic core. Rotary motion is restricted to less than 360 degrees by using an integrally formed hinge between the pivoting member and the pivot point, rather than by a more complex bearing. By virtue of this design, a large range of motion can be achieved without requiring a true bearing to be fabricated in the device. The pivoting member is also constrained in either of two stable positions upon de-energization of the electromagnetic core, by the attachment of a bistable spring between the pivoting member and the substrate.

Low inertia latching microactuator

The invention describes a method and apparatus for deploying micromachined actuators in a plane which is orthogonal to the original fabrication plane of the devices. Using batch-processing, photolithographic procedures known in the micromachined electro-mechanical system (MEMS) art, a plurality of devices is constructed on a suitable substrate. The devices are then separated one from another by sawing and dicing the original fabrication wafer. The devices are rotated into an orthogonal orientation and affixed to a second wafer. The second wafer also contains circuitry for addressing and manipulating each of the devices independently of the others. With this method and apparatus, arrays of actuators are constructed whose plane of actuation is perpendicular to the plane of the array. This invention is useful for constructing N&times;M fiber optic switches, which direct light from N input fibers into M output fibers.

An optical switch is fabricated using micro-electro-mechanical system (&ldquo;MEMS&rdquo;) techniques. A thin mirror is fabricated in the major plane of the substrate and rotates about an axis perpendicular to the major plane to move into and out of an optical beam path. The mirror surface is open for chemical polishing and deposition, resulting in a high-quality mirror. In one embodiment, the backside of the mirror is patterned with reinforcing ribs. In another embodiment, a two-sided mirror is fabricated.

Optical switch with low-inertia micromirror

An optical cross-connect is fabricated on a substrate using individual MEMs dice with mirrors that rotate into and out of an optical beam path. Each die can be aligned to a single (input-output) pair of collimators in a fiber-optic switching system. An individually accessible magnetic drive on each die provides low power consumption when re-configuring the array in addition to fast switching speeds. The state of each die can be electronically sensed to verify proper array configuration and operation of each die.

Growing community of inventors

Santa Barbara, CA, United States of America

John Wesley Stocker