Texas Instruments Corporation

Other

John Wesley Hamlin

Kelly Jay Taylor

Christopher Murray Beard

Earl Vedere Atnip

Song Zheng

Win Jae Jessie Yuan

Win-Jae Jessie Yuan

Jose Antonio Martinez Soto

Toby Linder

In an example, a method of manufacturing a MEMS device includes forming a via. The method also includes depositing metal in the via and depositing a first layer of a non-photoactive organic polymer on the metal. The method includes baking the first layer of the non-photoactive organic polymer. The method also includes depositing a second layer of the non-photoactive organic polymer on the first layer of the non-photoactive organic polymer after baking the first layer of the non-photoactive organic polymer. The method includes baking the second layer of the non-photoactive organic polymer. The method also includes etching the first layer and the second layer of the non-photoactive organic polymer.

System and method for array of MEMS elements

Systems and methods for MEMS devices are disclosed. A microelectromechanical system (MEMS) device includes a substrate, and a MEMS structure supported by the substrate. The MEMS structure includes a first layer of a first material comprising a titanium aluminum alloy. The MEMS structure further includes an aluminum layer on the first layer.

System and method for MEMS devices

In an example, a method includes depositing an organic polymer layer on one or more material layers. The method also includes thermally curing the organic polymer layer. The method includes depositing a hard mask on the organic polymer layer and depositing a photoresist layer on the hard mask. The method also includes patterning the photoresist layer to expose at least a portion of the hard mask. The method includes etching the exposed portion of the hard mask to expose at least a portion of the organic polymer layer. The method also includes etching the exposed portion of the organic polymer layer to expose at least a portion of the one or more material layers.

Multi-level microelectromechanical system structure with non-photodefinable organic polymer spacer layers

Described examples include a micromechanical device having a substrate. The micromechanical device includes a MEMS element and a via between the MEMS element and the substrate, the via having a conductive layer extending from the substrate to the MEMS element and having a structural integrity layer on the conductive layer.

MEMS via with enhanced electrical and mechanical integrity

Apparatus system and method of maintaining differential atmospheric control with respect to CO2 and O2 gases in a first, stem/leaf zone, Z-, of a plant from a second, root zone, Z-, of the plant. The atmosphere in a stem/leaf zone is controlled to be high in CO2 while the root zone Z-is isolated and provided with ambient or higher O2, at a pressure to prevent infiltration of CO2 from zone Z-. The differential atmosphere in each zone can be selectively monitored and adjusted to provide improved growing conditions. The inventive plant environment control system and method is particularly useful in the field of hydroponic and aeroponic growing enclosures, wherein nutrients are periodically provided to the roots, and a high CO2 atmosphere, plus heat and light of appropriate growth-enhancing wavelengths, are provided to the leaves for forced, high-yield growth of selected plants indoors, regardless of the season.

Growing community of inventors

Dallas, TX, United States of America

John Wesley Hamlin