International Business Machines Corporation

John W Pavick

John George Hartley

Gregory J Dick

Abigail S Ganong

Joseph B Frei

Denise M Puisto

An e-beam system for making masks corrects the beam for pattern-dependent errors by executing the bulk of the post-processing program only once, with two sets of output data being generated by the encode routine. A first output file of the encode routine generates the beam control data without pattern-dependent corrections. A second output file merges the beam control data with the data for metrology marks. A test wafer is patterned using the second output file and measured to generate a set of pattern correction data. Production wafers are written using the beam control data corrected on the fly by the pattern correction data.

Correction of pattern-dependent errors in a particle beam lithography system

A system and method of converting large Integrated Circuit (IC) designs into patterns. First, based on shape density, the design is fragmented into pieces, each piece including roughly the same number of shapes. Next, a band of shapes, all within the proximity correction area for each piece, are identified. Each piece, including its identified band, is processed individually to convert data within the piece and within the proximity correction band to Numerical Control (NC) data. The NC data for the proximity correction band is discarded. The piece's NC data is stored as an NC data file for the piece. This is repeated until all of the pieces are converted to NC data. Finally, the pattern is written, one piece at a time.

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Lagrangeville, NY, United States of America

John W Pavick