Saint-gobain/norton Industrial Ceramics Corporation

Saint-gobain Ceramics & Plastics, Inc.

Norton Company

Saint-gobain Industrial Ceramics, Inc.

John T Vayda

Jack Shindle

Stephen Dynan

Bryan D Foster

William J Elliot

Richard F Buckley

Scott R Axelson

A vertical ceramic wafer boat for supporting a silicon wafer having a predetermined radius R. The wafer boat comprises a base and a pair of column racks. The column racks extend generally vertically upwards from the base. Each column rack includes at least one arm having an arcuate section. Each arcuate section is sized to provide substantial support for a 0.7 R boundary region of the wafer and spans an arc of less than 180 degrees.

Wafer boat with arcuate wafer support arms

A hydrogen torch comprising concentric inner and outer fluid delivery tubes, wherein;

Hydrogen torch

A raw batch for producing a crack-free recrystallized silicon carbide body, the raw batch comprising:

Raw batch for making crack-free silicon carbide diffusion components

This invention is a process for making crack-free silicon carbide components wherein the level of free silica in the raw batch is controlled.

Process for making crack free silicon carbide diffusion components

A method for producing a crack-free recrystallized silicon carbide body, icluding the steps of:

Process for making crack-free silicon carbide diffusion components

This invention relates to a method for producing a crack-free sintered silicon carbide body, comprising the steps of:

A hydrogen torch comprising concentric inner and outer fluid delivery tubes wherein the outer tube comprises silica and the inner tube comprises silicon carbide. One end of the inner tube is connected to a third tube comprised of silica which has an inlet in fluid connection with a hydrogen supply line. The outer tube is in fluid connection with an oxygen supply line. A reverse ball joint connection is used to join the tubes and defines an annulus between the inner and outer tubes through which the oxygen can flow and be isolated from the hydrogen flowing within the inner tube.

Hydrogen torch having concentric tubes and reverse ball joint connection

A process for producing a ceramic igniter comprising forming a slot in a green igniter body prior to densification and inserting into the slot an electrically non-conductive material is described. In addition, a ceramic igniter containing a slot insert produced by the process of the invention is disclosed. The inventon is particularly directed to single and double hairpin-shaped igniters.

Growing community of inventors

West Brookfield, MA, United States of America

John T Vayda