Advanced Micro Devices Corporation

John T Shea

Mikkel Lantz

Richard J Bartlett

Valerie Guinan

An approach for managing a manufacturing process is provided. A specification and recipe management system (RSMS) manages the validation of new specifications that reference one or more recipes and one or more contexts stored in a recipe management system (RMS). The validation of new specifications includes verifying that RMS code blocks contained in the new specification can be processed by the RMS. Also, the versions of recipes and contexts referenced in the specification are checked to ensure that they are either the current, valid version number or a valid new version number. The RSMS provides a specification browser for examining cross-reference information for specifications, recipes and contexts. The cross-reference information specifies recipes and contexts referenced in a selected specification, subject to a recipe/context filter. In addition, the cross-reference information identifies specifications that reference a selected recipe or a selected context, subject to a specification filter. A project editor allows specifications, recipes and contexts to be grouped into projects for release. The versions of recipes and context referenced by the specifications contained in the project are compared to ensure that the same version of a recipe is referenced by all of the specifications in a project and that all specification referencing changing recipes or contexts are in the project.

Validating process data in manufacturing process management

A method and apparatus for manufacturing products is provided with a computer that controls a processing tool, and a sensor that senses an operating condition of the processing tool. The sensor is coupled to the computer so that the setup and operation of the sensor is controlled by the computer. The control of the sensor and the processing tool by the computer is performed according to a single recipe, thereby providing automatic setup of the sensor in addition to the processing tool. Information from the sensor gathered during the processing step is integrated into the database coupled to the computer to provide correlation between the sensor data and lot and entity records related to the products being manufactured by the processing tool.

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Sunnyvale, CA, United States of America

John T Shea