Momentive Performance Materials Gmbh

Advanced Ceramics Corporation

General Electric Company

John T Mariner

Wei Fan

Douglas Alan Longworth

Xiang Liu

Marc Schaepkens

Ajit Sane

Timothy J Hejl

Toshiki Ebata

Haluk Sayir

Benjamin John Olechnowicz

Jon Leist

David Michael Rusinko, Jr

Zhong-Hao Lu

Jeffrey Lennartz

Donald William Pultz, Jr

Thomas E Devan

Kensuke Fujimura

Feng Liao

Andrew John Macey

Eric Wintenberger

Aaron Rape

Lawrence E Finley

David M Rusinko, Jr

A thermal management assembly comprising a bulk graphene material and a metal-based coating layer disposed on opposing surfaces of the bulk graphene core material comprising an agent that is reactive with the graphene to form a carbide. The metal-based coating layer can serve as an outer layer of the assembly or can serve to bond the graphene to other materials encapsulating the graphene core. The metal-based coating layer with the reactive agent provides an assembly exhibiting excellent thermal conductivity properties and greatly improved thermal interface resistance.

Thermal management assembly comprising bulk graphene material

A high thermal conductivity/low coefficient of thermal expansion thermally conductive composite material for heat sinks and an electronic apparatus comprising a heat sink formed from such composites. The thermally conductive composite comprises a high thermal conductivity layer disposed between two substrates having a low coefficient of thermal expansion. The substrates have a low coefficient of thermal expansion and a relatively high modulus of elasticity, and the composite exhibits high thermal conductivity and low coefficient of thermal expansion even for composites with high loadings of the thermally conductive material.

High thermal conductivity/low coefficient of thermal expansion composites

A heating apparatus for regulating/controlling the surface temperature of a substrate is provided. At least a thermal pyrolytic graphite (TPG) layer is embedded in the heater to diffuse the temperature difference of the various components in the heating apparatus and provide temporal and spatial control of the surface temperature of the substrate, for a relatively uniform substrate temperature with the difference between the maximum and minimum temperature points on the substrate of less than 10&#xb0; C.

Heating apparatus with enhanced thermal uniformity and method for making thereof

A containment vessel for evaporating materials for use in applying film coatings to a substrate includes a body fabricated from a refractory material. In one embodiment the body includes end portions capable of being connected to other bodies in an end to end fashion. In another embodiment, the body includes an integral patterned conductor incorporated into the outer surface portion of the body to facilitate association with an electrical power source for heating.

Large volume evaporation source

A layered heater structure including an electrode layer and a localized tuning method for tuning the electrode layer of a layered heater structure with high precision is provided. The localized tuning method tunes the electrode layer to its proper local resistance to minimize temperature offsets on the heater surface and thus provide a desired thermal profile that is in marked contrast to conventional, non-localized resistance tuning approaches based on thickness trimming practices, such as grinding or blasting, or resistivity adjustment, such as local heat treatment.

Electrode tuning method and apparatus for a layered heater structure

A graphite heater and method of forming a graphite heater comprising a graphite body configured to form an electrical heating circuit for at least one heating zone through the graphite encapsulated in a continuous overcoat layer comprising at least one of a nitride, carbide, carbonitride or oxynitride of elements selected from a group consisting of B, Al, Si, Ga, refractory hard metals, transition metals, and rare earth metals, or complexes and/or combinations thereof, wherein prior to being configured to form the electrical heating circuit path, the graphite body is coated with a layer comprising at least one of a nitride, carbide, carbonitride or oxynitride of elements selected from a group consisting of B, Al, Si, Ga, refractory hard metals, transition metals, and rare earth metals, or complexes and/or combinations thereof.

Encapsulated graphite heater and process

A wafer processing device or apparatus, i.e., a heater or an electrostatic chuck, comprises a planar support platen, a support shaft having centrally located bore, and a pair of electrical conductors located in the shaft. In one embodiment, the electrical conductors are concentrically located within the bore of the shaft, with the first electrical lead being in the form of a pyrolytic graphite rod and separated from the outer second graphite electrical lead by means of a pyrolytic boron nitride (pBN) coating. In a second embodiment, the support platen and the support shaft are formed from a single unitary body of graphite. In yet another embodiment of the device of the invention, the connection posts comprise a carbon fiber composite and the exposed ends of the electrical connectors are coated with a protective ceramic paste for extended life in operations.

Wafer handling apparatus and method of manufacturing thereof

A heat treatment apparatus for use in batch heating/wafer processing is provided, which comprises a process chamber for receiving a wafer boat, at least a heating element comprising a substrate body configured to form an electrical heating circuit for at least one heating zone and encapsulated in a continuous overcoat layer, a heat reflector comprising a heat reflective surface disposed on the heating element, and the heating element has a ramp rate of at least 1&#xb0; C. per second for heating the wafers in the wafer boat.

Semiconductor batch heating assembly

The invention relates to a feedstock material for use in making heat spreaders, comprising a sheet of annealed pyrolytic graphite having a thermal conductivity of greater than 1000 watts/m-K, a size in any dimension of at least 5 cm and a thickness of at least 0.2 mm. In one embodiment, the feedstock is made by hot-pressing a stack of alternate layers of pyrolytic graphite sheets with flat graphite dies for a finished sheet of annealed pyrolytic graphite comprising a plurality of layers being parallel to each other of at least 0.075 degrees per mm of thickness. In another embodiment, the finished sheet of annealed pyrolytic graphite is made by graphitizing a stack of films comprising a high-carbon polymer.

Bulk high thermal conductivity feedstock and method of making thereof

A vacuum heater assembly for heating fluids flowing within; the assembly comprises an inner member having a heating surface with an average cross-sectional area with an aspect ratio of at least 2. The inner member is disposed within an outer member and with a vacuum drawn in the space between the inner member and the outer member, the heat transfers toward the center of the inner member, heating the fluids flowing within.

Vacuum insulated heater assembly

A flash evaporator vaporization vessel for flash evaporating metal under conditions of repeated thermal cycling having a graphite body and an outer layer of pyrolytic boron nitride having a density above 2.15 gm/cc and preferably between 2.19 gm/cc and 2.2 gm/cc.

High density flash evaporator

This invention is directed to a composite composition of particles of highly oriented graphite in the form of flakes having a hexagonal crystal orientation and an aspect ratio of at least 5 to 1 and a polymeric binder which when polymerized under compression forms a solid having a high thermal conductivity and low density and to a method of forming a machinable composite of high thermal conductivity comprising the steps of combining particles of highly oriented graphite flakes having an hexagonal crystal orientation and an aspect ratio of at least 5 to 1 with a polymeric binder to form a composition having at least a 40% graphite particle volume fraction, compressing the composition under a pressure sufficient to substantially align the particles parallel to one another and to the surface of the composition normal to the direction of the applied pressure until said binder polymerizes into a solid thereby forming an electrically conductive solid having a high thermal conductivity.

High thermal conductivity composite and method

A flash evaporator heater including a substrate formed of an intermetallic compound or of graphite and having an outer coating composed of pyrolytic boron nitride or pyrolytic graphite. The substrate has a substantially rectangular configuration with a substantially flat upper surface and a recessed cavity. The cavity has a longitudinal cross sectional geometry which forms a slope intersecting the substantially flat upper surface of the substrate at an angle .alpha. of less than 60 degrees.

Growing community of inventors

Avon Lake, OH, United States of America

John T Mariner