International Business Machines Corporation

John T Federico

Perry G Hartswick

Alan C Thomas

Brian Christopher Barker

George R Goth

Richard Gerard Burda

Susan E Chaloux

Jonathan Levy

Benjamin R Wheeler

Thomas D Stahlecker

Lawrence R Bauer

Oliver Liao

Anne Marie Pelella

A method identifies time sensitive processing sequences within a production environment using a computerized device. The processing sequences perform operations utilizing one or more tools. The method also identifies non-committed work in process items that are grouped in non-committed lots for release into one or more of the time sensitive processing sequences, and identifies committed work in process items that are being processed in committed lots within the time sensitive processing sequences, using the computerized device. The method sorts the non-committed lots by a predetermined priority, again using the computerized device. Starting with the highest priority non-committed lot (and continuing with others of the non-committed lots in priority order) the method determines whether there is available tool capacity to process a non-committed lot through each corresponding time sensitive processing sequence using the computerized device. If the tool capacity is available for the non-committed lot, the method releases the non-committed lot to begin the corresponding time sensitive processing sequences, using the computerized device.

Product release control into time-sensitive processing environments

A method for employing a plurality of reusable reticles in an integrated circuit manufacturing process employing lithographic exposure of a semiconductor wafer. Initially there is provided a matrix of a plurality of reticles, each matrix comprising a plurality of tuples of reticles, each reticle tuple comprising one or more reticles. The method then includes defining at least one set of valid groups of reticles in the matrix for use in a desired lithographic exposure process, defining a set of conditions for determining availability of all reticles in the valid groups in the lithographic exposure process, and comparing the availability conditions to the reticles in the set of valid groups and eliminating valid groups which do not meet the availability conditions, leaving non-eliminated valid groups. The method also includes defining a set of conditions for determining priority of all reticles in the non-eliminated valid groups in the lithographic exposure process, comparing the priority conditions to the reticles in the set of valid groups and ranking non-eliminated valid groups according to the priority conditions, and selecting for use in the lithographic exposure process reticles from the non-eliminated valid groups according to ranking by the priority conditions.

Reticle exposure matrix

A system is provided for controlling the time at which a durable item, such as a reticle used in a lithography process in semiconductor manufacturing, is requalified for use. A counting device counts occurrences of predefined events, such as the number of jobs in which the reticle is used or the number of times it is placed in a lithography tool. The reticle is not removed from use until a limiting number of jobs or tool placements is reached, or the reticle is needed for processing the requalification job. The system also includes a requalification device for the durable item.

Requalification controller for durables

In a manufacturing line having a plurality of production jobs performed on a plurality of production units in a plurality of processing areas, a method and related system for selecting a number of production units to be sent to a designated process area other than the plurality of processing areas.

Method and apparatus for controlling product routing in a manufacturing line

A system monitors usage of a tool in a tool set and warns an operator and/or prevents usage of a tool chosen by an operator, subject to possible override by the operator, if permitted, in order to balance usage among tools of the tool set and verify operational conditions of tools of the tool set through usage. The system and method are entirely transparent to the operator and the operator is permitted full flexibility of tool choice unless tool usage becomes unbalanced. The system and method preferably limits usage based on length of consecutive usage and percentage of product processed by each tool. Use of new, modified or repaired tools is also prevented until the tool is certified for a particular process and defined to the system.

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Wappingers Falls, NY, United States of America

John T Federico