Varian Semiconductor Equipment Associates, Inc.

John Slocum

Robert C Lindberg

Chris Campbell

Stefan Casey

Kevin M Keen

An ion source has an arc chamber with an electron-emitting element and a repeller. A manifold assembly defines a cavity and a gas outlet configured to allow gas flow to the arc chamber. This gas outlet is closer to the repeller than the electron-emitting element. In one embodiment, the ion source has a first crucible and a second crucible. The first crucible and the second crucible are connected to the manifold assembly. In one instance, the crucibles have tamper-resistant features.

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Medford, MA, United States of America

John Slocum