The University of Salford

John S Colligon

Hamid Kheyrandish

Arthur E Hill

Apparatus for and a method of modifying the properties of a material. A single ion beam from a source in a vacuum chamber is deflected by an electrostatic deflection system between a target and a substrate. When on the target, the beam sputters material therefrom on to the substrate. When on the substrate the beam bombards material previously deposited on it from the target which mixes it with the material of the substrate. A modified surface layer may therefore be achieved. The target and substrate may be moved relative to the beam if desired and the process may be monitored and controlled using appropriate sensors and controls.

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Manchester, United Kingdom

John S Colligon