Applied Materials, Inc.

John Rusconi

Mahendran Chidambaram

Ludovic Godet

Wei-Sheng Lei

Visweswaren Sivaramakrishnan

Daihua Zhang

Kazuya Daito

Kang Luo

Hemantha Raju

Alexey Stepanov

Bahubali S Upadhye

Elsa Massonneau

Kenneth S Ledford

Michael David-Scott Kemp

Shmuel Erez

A process of producing optical devices is provided including transferring a first substrate comprising one or more devices to a laser dicing tool, the laser dicing tool including a filamentation stage and a singulation stage. One or more device contours are created on the first substrate in the filamentation stage. The optical devices are singulated from the first substrate along the one or more device contours in the singulation stage. The devices are transferred to storage or for further backend processing.

Laser dicing system for filamenting and singulating optical devices

Embodiments described herein relate to an inkjet printing platform. The inkjet printing platform is utilized for fabrication of optical films and optical device structures. The inkjet printing platform includes a transfer chamber, one or more inkjet chambers, a plurality of auxiliary modules, a substrate flipper, and load ports. The inkjet printing platform is operable to perform an inkjet printing process on a substrate to form an optical film and/or an optical device.

Inkjet platform for fabrication of optical films and structures

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Dublin, CA, United States of America

John Rusconi