Other

Praxair S.t. Technology, Inc.

Fm Industries, Inc.

Dorsey Gage, Inc.

John R Miller

Mahmood Naim

Joseph Logan

Robert W Tompkins

David R Hammerich

Kevin Argabright

Jae Yong Cho

James E LaRoche, Iii

Robert E Tompkins

A heated electrostatic chuck is provided, including a base having an upper surface and peripheral side surfaces, a thermal barrier coating formed by plasma deposition directly on at least the upper surface of the base, at least one heating element formed on portions of the thermal barrier coating, an electrically insulating layer formed on the heating element and exposed portions of the thermal barrier coating, at least one chucking electrode formed on at least a portion of the electrically insulating layer, and a protective layer formed on the chucking electrode.

Heated electrostatic chuck and semiconductor wafer heater and methods for manufacturing same

The invention is a hybrid chuck for securing workpieces with an electrostatic charge. The hybrid chuck includes a dielectric base for supporting the hybrid chuck. The dielectric base has a top surface and a conductive layer covers at least a portion of the top surface of the dielectric base. The conductive layer is conductive for receiving a current that creates an electrostatic charge and is non-metallic for maintaining the electrostatic charge without significant eddy current losses in the presence of dynamic electromagnetic fields. The top working surface covers the conductive layer and is flat for holding workpieces upon the receiving of the current to create the electrostatic charge in the conductive layer.

Hybrid ceramic electrostatic clamp

An electrostatic chuck is formed by: providing a conductive base member; machining a pattern of ridges in the top surface of the base member; providing through holes in the base member; inserting insulated contact posts into through holes and joining same to the base member in such manner that the contact posts extend above the top surface of the base member; depositing a first insulating layer over the base member top surface, ridges and the contact posts, the thickness of the insulating layer being less than the height of the contact posts above the base member surface; removing the first insulative layer from the top of the contact posts and removing a portion of the contact posts in such manner that the contact posts are flush with the surrounding first insulating layer; depositing a conductive layer over the first insulating layer and the tops of the contact posts, the thickness of the conductive layer being approximately the height of the ridges; grinding the top surface of the base member flat to the point of exposing the first insulating layer over the ridges to form separate electrodes; depositing a second insulating layer over the conductive layer and first insulating layer; and, joining the conductive base member to a supporting frame.

Electrostatic chuck and method of manufacture

A bowling ball having at least one recess, and an insert generally filling said recess and formed of material molded about the fingers of the user of the ball to provide finger holes formed in said insert corresponding precisely to the size, spacing and curvature of the fingers of the user of the ball. A cap drilled to match the alignment of the customized finger holes is glued to the top of the insert to match the outer surface of the bowling ball.

Bowling ball

A gear shaping machine includes a cutter mounted at the lower end of a spindle and a worm gear surrounding the spindle. A first guide is provided on the spindle and has axially extending guide flutes formed thereon. A second guide is disposed in surrounding relation to the spindle and has axially extending guide grooves formed in an inner surface for sliding engagement with the spindle guide flutes and helically advancing guide flutes formed in its outer surface for engaging corresponding guide flutes formed in the inner surface of the worm gear. A first adjustable eccentric is coupled to the spindle for controlling the vertical movement thereof and a second adjustable eccentric is coupled to the second guide for selectively controlling its vertical movement.

Growing community of inventors

Wappingers Falls, NY, United States of America

John R Miller