Nikon Corporation

John Peterson

Andrew J Hazelton

Gabor D Szoboszlay

A stage assembly ( ) for moving a device ( ) along an X axis and a Y axis includes a stage base ( ), a device table ( ), a stage mover assembly ( ), a measurement system ( ), and a control system ( ). The stage mover assembly ( ) includes a pair X guide movers ( ) ( ) and a Y table mover ( ). The measurement system ( ) includes a first X system ( ) and a second X system ( ). The control system ( ) receives the position signals from the measurement system ( ) and directs current to the X movers ( ) ( ) to move the device table along the X axis. The control system ( ) can be designed to not skip any servo cycles during switching of position signals.

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Woodside, CA, United States of America

John Peterson