Bookham Technology Limited

Oxsensis Limited

John Paul Drake

Arnold Peter Roscoe Harpin

Stephen William Roberts

Stephen Geoffrey Tyler

Andrew George Rickman

Arnold Peter Harpin

James Stuart McKenzie

Robin Jeremy Morris

Bradley Jonathan Luff

Emma Jane Clarissa Dawnay

Stephen Geoffrey Unwin

Matthew Peter Shaw

An optical sensor () comprises an optical cavity defined by a dielectric body and responsive to one or more physical environmental conditions, and a waveguide () having a terminal end spaced apart from the optical cavity such that light is optically coupled from the terminal end of the waveguide () to the optical cavity. The waveguide () is arranged such that, in use, it is maintained at a first temperature that would not damage the optical coupling to the optical cavity when the dielectric body is maintained at a second temperature sufficient to damage the optical coupling to the optical cavity.

Optical sensor

A rib waveguide structure comprising a layer ( ) of light conductive material defined between two planar faces with a rib ( ) formed on one of the faces and an optical component e.g. a tapered waveguide ( ) optically coupled to the other face. An inverted rib waveguide comprising a light conductive layer ( ) and a rib ( ) that projects from the light conductive layer ( ) into a substrate ( ) is also described as well as other optical devices comprising a light conductive layer separated from a substrate by a non-planar layer ( ) of light confining material and optical devices comprising two or more layers ( ) of light confining material buried within a rib with a light conducting component ( ) at least a part of which is formed between planes defined by the two layers of light confining material. A method of forming such devices is also described.

Integrated optical device

A method of forming an integrated chip optical device as a protective layer formed over part of the face of the chip on which at least one optical waveguide is formed, and the protective coating is selectively removed leaving the coating over an edge region and the edge of the device is polished to provide high edge quality against which offchip optical fibers may be abutted.

Integrated chip optical devices

Method of fabricating an integrated optical component

A process for treating a waveguide structure which comprises a silicon substrate with an integrally formed rib waveguide is described. The waveguide has an end portion with a facet, the end portion overhanging the silicon substrate and having an oxide layer on its underside protruding from the facet of the waveguide. A nitride layer extends over the upper surface of the waveguide and the facet. The treatment process involves etching the oxide layer from the underside, growing a new oxide layer, etching the nitride layer and then depositing a new nitride layer.

Process for making optical waveguides

An apparatus is provided for coupling an optical fibre to a waveguide on an optical chip, the apparatus comprises a recess in the chip for receiving the optical fiber, the recess comprising a V-groove the side faces of which locate the position of the fiber in directions perpendicular to the optical axis of the fiber so as to position the fibre in alignment with the waveguide, and an end face adjacent the end of the waveguide, the end face of the recess being substantially flat and substantially perpendicular to the plane of the chip with its normal inclined to the optical axis of the waveguide so an optical fiber having an inclined end face can be brought into a close, abutting relationship with the end of the waveguide and brought into rotational alignment therewith about its optical axis by positioning the fiber so its inclined end face lies in planar contact with the end face of the recess.

Coupling optical fibre to waveguide

A process for making a silicon rib wavegide structure is described comporising the following steps:

Manufacture of a silicon waveguide structure

A connection between an integrated optical waveguide and an optical fibre has a layer of silicon in which a rib waveguide is formed separated from a substrate by a layer of silicon dioxide. A V-groove is formed in the substrate for receiving an optical fibre, and the V-groove is arranged to align the optical fibre at a predetermined angle with respect to the waveguide. The rib waveguide and the underlying layer of silicon dioxide are formed to overhang the end of the V-groove so that the end of the waveguide is in close proximity with the end of an optical fibre positioned in the V-groove. A method of forming a connection, in which the V-groove is etched using a material which etches the substrate material as opposed to the layer of silicon dioxide, is also disclosed. Finally, a method of connecting an integrated optical waveguide to an optical fibre using a connection as described above is disclosed.

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Lambourn, United Kingdom

John Paul Drake