Texas Instruments Corporation

John P Williston

Martin Austin Wand

Thomas J Doty

David F Summerville

Haradon J Rice

Richard L Guldi

Keith W Melcher

Phen-Lan Huang

Anh V Ho

Chuan-Fu Lin

The marking of identification and orientation information along the edge (E) of a semiconductor wafer ( ) is disclosed. The information may be marked by way of laser marking at one or more locations ( ) along a flat portion ( ) or bevel ( ) of the edge (E) of the wafer ( ). The wafer marking ( ) may be encoded, for example by way of a 2-D bar code. A system ( ) for reading the identification information from wafers ( ) in a carrier ( ) is also disclosed. The system ( ) includes a sensor ( ) for sensing reflected light from the wafer markings ( ) along the wafer edge (E), and for decoding identification and orientation therefrom. A motor ( ), under the control of feedback (RFB) from the sensor ( ), rotates the wafers ( ) by way of a roller ( ) until the wafer marking ( ) is in view by the sensor ( ). A processing system ( ), which includes a rotatable chuck ( ) upon which the wafer ( ) is placed, is also disclosed. The processing system ( ) also includes a sensor ( ) for sensing identification and orientation information from the wafer edge (E), and a process control computer ( ) that receives signals corresponding to the identification information, for purposes of manufacturing data logging and process control.

Semiconductor wafer edge marking

The marking of identification and orientation information along the edge (E) of a semiconductor wafer ( ) is disclosed. The information may be marked by way of laser marking at one or more locations ( ) along a flat portion ( ) or bevel ( ) of the edge (E) of the wafer ( ). The wafer marking ( ) may be encoded, for example by way of a 2-D bar code. A system ( ) for reading the identification information from wafers ( ) in a carrier ( ) is also disclosed. The system ( ) includes a sensor ( ) for sensing reflected light from the wafer markings ( ) along the wafer edge (E), and for decoding identification and orientation therefrom. A motor ( ), under the control of feedback (RFB) from the sensor ( ), rotates the wafers ( ) by way of a roller ( ) until the wafer marking ( ) is in view by the sensor ( ). A processing system ( ), which includes a rotatable chuck ( ) upon which the wafer ( ) is placed, is also disclosed. The processing system ( ) also includes a sensor ( ) for sensing identification and orientation information from the wafer edge (E), and a process control computer ( ) that receive signals corresponding to the identification information, for purposes of manufacturing data logging and process control.

The invention is a modular and hierarchically organized set of computer programs which comprise methods for controlling a system of semi-autonomous automatically guided vehicles, such as mobile robots. The methods include control programs which: execute in stationary control computers; communicate between the stationary control computer programs and corresponding programs which execute in mobile control computers aboard the vehicles; operate independently in mobile control computers aboard the vehicles. The invention allows the system executive program to command the mobile vehicles to start, to stop, to transfer material to or from the vehicles, to change batteries in the vehicles, to park the vehicles at specific points in a factory, to move the vehicles from point to point in a factory, and to remove the vehicles from the factory. The invention improves the performance of conventional automatically guided vehicle systems by maximizing the autonomy of individual vehicles while retaining sufficient supervisory control at the system executive level to provide the maximum flexibility in routing and scheduling the activity of the vehicles. The invention 'closes the loop' in an automatically guided vehicle system by providing the highest level of control between mobile vehicles and stationary control computers.

Hierarchical control system for automatically guided vehicles

The invention is a method of static collision avoidance for multiple automatically guided vehicles (AGVs) on bidirectional paths. It defines the allowable travel path for an AGV as a series of path segments through or between possible destination points (called nodes) which are defined for the factory floor. AGVs can move to or through any of these nodes and can arrive in a predetermined order, according to 'rules' defined by the method. The invention provides better performance than conventional AGV systems by allowing multiple AGVs to coexist in the same pathways without collision or excessive queueing in systems which use free-roving AGVs having programmable bidirectional paths. This new ability maximizes the degrees of freedom of AGV movement while minimizing collisions and 'deadlock.'

Static collision avoidance method for multiple automatically guided

The invention provides a method for communicating the need to move a mobile robot, such as an AGV, from one location (node) to another, on a node-by-node basis, incrementally, among the nodes established in a physical environment such as a factory. The invention also provides the means to generate the commands necessary to accomplish this motion, by providing specific steering and drive information such as angle and speed to the mobile robot or AGV. The invention accomplishes these tasks in response to direct commands from a stationary controller as well as in response to continuous node-by-node position updates provided by an external navigation system, such as a visual navigation system, or an internal dead-reckoning navigation system, or both.

Method for controlling the movements of a mobile robot in a multiple

A visual navigation system provides absolute position information to multiple automatically guided vehicles (AGVs) such as mobile robots. The beacon-equipped AGVs emit light visible to overhead television cameras. The beacons are arranged and controlled so that the vision systems can acquire, measure, and report the locations of multiple AGVs. The system controller incorporates a programmable 'factory map', or knowledge base, of allowable paths of travel for the AGVs, which navigate by dead reckoning with periodic position updates from the visual navigation system. The visual navigation system notifies the autonomous AGVs and the system controller when an AGV strays from its command path. The combination of computer controls in the elements of the system provides the means to stop and to recover straying AGVs. The navigation system visually monitors normal AGV travel, off-course corrections, 'lost' AGV searches, and recovery. Thus, it provides closed-loop, servo-like operation.

Closed-loop navigation system for mobile robots

The invention is a method of dynamic collision avoidance for multiple automatically guided vehicles (AGVs) on bidirectional paths. It calculates windows, or areas of computer memory, against which it matches the reported positions of AGVs. The invention acts on information from a central data base in which the factory or operating space of the AGVs is mapped and from AGV position updates supplied by an independently operating visual navigation system. The invention dynamically calculates the locations and dimensions of the windows for each position update. Since these position updates occur in real time, many times each second, the invention provides the means for the AGV system's controller to prevent collisions between the AGVs and other objects without minimizing the degrees of freedom of AGV movement.

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Plano, TX, United States of America

John P Williston