Texas Instruments Corporation

John P Ossenfort

Brett A Mangrum

Clayton Lee Stevenson

An apparatus for use with a digital micro-mirrorincludes a hingedisposed outwardly from a substrate. The hingeis capable of at least partially supporting a micro-mirrordisposed outwardly from the hinge. The micro-mirroris capable of being selectively transitioned between an on-state position and an off-state position. In one particular embodiment, the hingecomprises a substantially flat profile for at least a portion of the hingedisposed between a first hinge postof the hingeand a mid-point of the hinge. The apparatus also includes a plurality of process control voids formed within a conductive layerdisposed inwardly from the hinge. In one particular embodiment, the substantially flat profile is at least partially created from the plurality of process control voids.

Hinge design for enhanced optical performance for a digital micro-mirror device

An apparatus for use with a digital micro-mirror includes a hinge disposed outwardly from a substrate. The hinge is capable of at least partially supporting a micro-mirror disposed outwardly from the hinge. The micro-mirror is capable of being selectively transitioned between an on-state position and an off-state position. In one particular embodiment, the hinge comprises a substantially flat profile for at least a portion of the hinge disposed between a first hinge post of the hinge and a mid-point of the hinge. The apparatus also includes a plurality of process control voids formed within a conductive layer disposed inwardly from the hinge. In one particular embodiment, the substantially flat profile is at least partially created from the plurality of process control voids.

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Dallas, TX, United States of America

John P Ossenfort