The Boc Group, Inc.

John P Lehan

J Kirkwood Rough

Russell J Hill

Charles K Carniglia

Henry A Byorum

A sputtering system using an AC power supply in the range of 10 kHz to 100 kHz uses two rotatable cylindrical magnetrons. The rotatable cylindrical magnetrons, when used for depositing a dielectric layer onto a substrate, clean off dielectric material that is deposited onto the target. This prevents a dielectric layer on the target from acting like a capacitor and may help avoid arcing. Additionally, an impedance-limiting capacitor can be placed in series in the electrical path between the targets through the transformer so as to reduce arcing. This impedance-limiting capacitor has a value much larger than the capacitors used to couple the power supply to a target in radio frequency sputtering systems.

Sputtering system using cylindrical rotating magnetron electrically

The use of a telecentric system allows for minimizing the changes in the measured radiometric quantity as a result of defocus or tilt of the object under measurement or of the detector. In a preferred embodiment, a telecentric illuminating system is provided, which illuminates an object from a source. A telecentric receiving system receives reflections from the object and relays them to a detector. In another preferred embodiment, a telecentric system is also described that is appropriate for radiance or radiant intensity measurements.

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Benicia, CA, United States of America

John P Lehan