Amo Manufacturing Usa, LLC

Eagle Technology, LLC

Visx, Inc.

John Osborn

Mark E Arnoldussen

Seema Somani

Charles R Munnerlyn

Gordon Chun Kong Wu

Peter Bickford

Nicholas Piekiel

Kenneth M Patterson

Brian Hart

Mitchell Gibson

Stray light in a metering structure is controlled by surrounding with a rigid shield an elongated length of a strut and supporting on the rigid shield a surface finish which is highly absorptive of light. The strut is thermally decoupled from the rigid shield using a plurality of insulating web layers comprising a multi-layer insulation (MLI) system disposed between the strut and the rigid shield. The MLI in such scenarios (1) thermally isolates the strut from the shield (2) serves as a support structure to support the rigid shield on the strut, and (3) absorbs thermally induced mechanical stresses as between the rigid shield and the strut.

Modular stray light mitigation

Metering structure includes a rigid strut configured to support an optical element. A rigid shield mounted on the strut has a shield length which is substantially coextensive with the elongated length of the rigid strut such that rigid shield substantially encloses the strut along the entire shield length. The rigid shield has a surface finish which is highly absorptive of electromagnetic radiation in the optical spectrum. One or more thermal insulating material layers comprise a multi-layer insulation (MLI) system disposed between the rigid strut and the rigid shield. Rigid and flexure brackets secure the rigid shield to the strut.

Low noise optothermally stable metering structure

Apparatus for homogenizing a laser beam includes a lenslet array. In some embodiments, the lenslets have a negative power. The lenslet array may include from 16 to 36 effective lenslets in some embodiments, or any other suitable number in alternative embodiments. Some embodiments additionally include a re-focusing lens for directing the beamlets onto a target so that the beamlets overlap and the energy distribution is homogenized. In an alternative embodiment, the lenslet array and re-focusing lens are combined in one optic.

Lenslet array for beam homogenization

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Spencerport, NY, United States of America

John Osborn