Calient Networks, Inc.

John Matthew Chong

Scott G Adams

Tim Davis

Kevin A Shaw

Scott A Miller

Seung Bok (Chris) Lee

John E Bowers

Noel C MacDonald

Kevin J White

Peter Hunt

Paul C Waldrop

David Edward Welsh

Roger Jonathon Helkey

Seung Bok Lee

Chandrasekhar Pusarla

Dan Blumenthal

Seung (Chris) Bok Lee

Robert Lewis

A method and apparatus are described that may be used to provide decoupled rotation of structures about different pivot points. The apparatus may include one or more fixed blades mounted to a frame or substrate, one or more movable blades mounted to each structure to be moved, and flexures on which the structures are suspended. Separate movable blades may be provided for each degree of freedom. When voltage is applied between the fixed and movable blades, the electrostatic attraction generates a force attracting movable blades toward blades that are fixed relative to the moveable blades, causing a structure to rotate about the flexures. The angle of rotation that results may be related to the size, number and spacing of the blades, the stiffness of the flexures and the magnitude of the voltage difference applied to the blades. The blades are fabricated using deep silicon etching.

Electrostatic actuator for microelectromechanical systems and methods of fabrication

Shaped electrodes for micro-electro-mechanical-system (MEMS) devices to improve actuator performance and methods for fabricating the same are disclosed. The shaped electrodes utilize its three-dimensional geometry to shape an electric field for electrostatic actuation for MEMS devices. For example, the height, width, length, sidewall slope, and layout of the shaped electrodes can be used to provide an optimum electric field in moving a MEMS mirror device. The shaped electrodes can provide electrostatic actuation at a low operating voltage and provide an optimum electric field for maximum tilt or angular range of motion for a MEMS mirror device. The shaped electrodes can be fabricated simply by using a pillar wafer and an electrode wafer. The pillar wafer can be used to form pillars as electrodes, or, alternatively, as barriers. A single substrate can also be used to form pillars and electrodes.

Shaped electrodes for micro-electro-mechanical-system (MEMS) devices to improve actuator performance and methods for fabricating the same

Electrostatic actuator for micromechanical systems

An optical switch having switch mirror arrays controlled by scanning beams that reduce the amount of electrical connections required and reduce the complexity for constructing large optical switches. Movement of the switch mirror arrays is controlled by one or more scanning beams. The optical switch includes one or more arrays of optical switch inputs and outputs and one or more arrays of movable mirrors to direct light beams from the optical switch inputs to the optical switch outputs. The optical switch also includes one or more control elements to control the movable mirrors based on scanning beams directed to the one or more control elements.

Optical switch having switch mirror arrays controlled by scanning beams

A method for fabricating semiconductor wafers as multiple-depth structure (i.e., having portions of varying height). The method includes patterning a first substrate and bonding a second substrate to the first. This process creates a subsurface patterned layer. Portions of the second substrate may then be etched, exposing the subsurface patterned layer for selective processing. For example, the layered structure may then be repeatedly etched to produce a multiple depth structure. Or, for example, exposed portions of the first substrate may have material added to them to create multiple-depth structures. This method of fabrication provides substantial advantages over previous methods.

Method of fabricating semiconductor wafers having multiple height subsurface layers

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Santa Barbara, CA, United States of America

John Matthew Chong