Asml Netherlands B.v.

U.S. Philips Corporation

John Maria Bombeeck

Johannes Cornelis Paulus Melman

Erik Henricus Egidius Catharina Eummelen

Theodorus Wilhelmus Polet

Giovanni Luca Gattobigio

Han Henricus Aldegonda Lempens

Koen Cuypers

Jorge Alberto Vieyra Salas

Frank Debougnoux

Ruud Hendrikus Martinus Johannes Bloks

Ronald Frank Kox

Patricius Jacobus Neefs

Pieter Jeroen Johan Emanuel Hoefnagels

An immersion lithography apparatus controller configured to control a positioner to move a support table to follow an exposure route and to control a liquid confinement structure, the controller configured to: predict whether liquid will be lost from an immersion space during at least one motion of the route in which an edge of the object passes under an edge of the immersion space, and if liquid loss from the immersion space is predicted, modify the fluid flow such that a first fluid flow rate into or out of an opening at a leading edge of the liquid confinement structure is different to a second fluid flow rate into or out of an opening at a trailing edge of the liquid confinement structure during the motion of predicted liquid loss or a motion of the route subsequent to the motion of predicted liquid loss.

Lithography apparatus and a method of manufacturing a device

Lithography apparatus and device manufacturing method

A device manufacturing method includes: confining a liquid to an immersion space between a projection system and an object; starting application of an underpressure to an extraction unit to remove fluid from a position proximate an edge of the object before the immersion space moves onto the object; moving the support table along a route comprising a series of motions such that a plurality of target positions on the object pass under the projection system; projecting through the immersion space a beam onto the target portions as the target portions pass under the projection system, the projecting performed to account for a certain predetermined thermal profile in the object; and stopping application of the underpressure at a predetermined time after the immersion space moves off the object for the last time during the series of motions to at least partly induce the certain predetermined thermal profile in the object.

The invention relates to an apparatus for processing a signal received via an information carrier. The apparatus comprises a receiving unit (,) for receiving a signal from the information carrier, an equalizer (,) for equalizing the signal thus received, and a signal processing device (,). The signal processing device (,) has a first signal path (,) including time delay means (,), a second signal path including differentiation means adapted to effect at least two differentiations with respect to time, a decision circuit (,), and a controllable switching element (,). The decision circuit (,) is adapted to transfer a control signal, the decision circuit being adapted to supply a control signal which depends upon the signals on the outputs (,) of the first signal path (,) and the second signal path (,). Depending on the action defined by the control signal the controllable switching element (,) couples the output (,) of the first signal path (,) to the output (,) of the controllable switching element (,) or it couples the output (,) of the second signal path (,) to the output (,) of the controllable switching element (,). The above-mentioned signal processing circuit reduces the influence of inter-symbol interference in the signal.

Apparatus for processing a signal received via an information carrier

An arrangement for reproducing a digital signal from a track on a magnetic record carrier (20) includes a magnetic read head (21) having a magneto resistive element ( 107), and an equalizer filter circuit (23) for equalizing the output signal of the read head. The equalizer filter circuit (23) includes an IIR filter (29) and FIR (30). The IIR filter (29) equalizes magnitude and group delay of the signal applied to its input in a low frequency region of the signal frequency range. The FIR filter equalizes at least the magnitude of the signal applied to its input in a higher frequency region of the signal frequency range. Viewed in the direction of transport of the record carrier, the MR head has a front side and a back side. One of the sides (41) has a magnetic shielding for the MR element (107) which is larger than the magnetic shielding of the other side (40). The MR head (21) is positioned relative to the track so that the front side (40) has the lesser magnetic shielding.

Arrangement for reproducing a digital signal from a track on a magnetic

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Eindhoven, Netherlands

John Maria Bombeeck