The University of Western Australia

Panorama Synergy Ltd

Drs Rsta, Inc.

John Marcel Dell

Lorenzo Faraone

Mariusz Martyniuk

Dilusha Silva

Adrian John Keating

Gino Michael Putrino

Jarek Antoszewski

Charles Anthony Musca

Kevin James Winchester

Roger Jeffery

Pradip Mitra

James E Robinson

Dhirendra Tripathi

Charlie A Musca

Laurie Faraone

The present disclosure relates to a method of fabricating a reflector, the reflector being at least partially reflective and at least partially transmissive for at least a wavelength of electromagnetic radiation; the method comprising:

Microelectromechanical systems (MEMS) and methods

A method of stimulating a MicroElectroMechanical Systems (MEMS) structure (e.g. a cantilever), and an optical sensor for use in such a method, using optical radiation pressure instead of electrostatic pressure, or the like. An optical pulse creates optical radiation pressure which stimulates movement of the MEMS structure and then movement of the MEMS structure may be measures. An interrogating light may be input after the optical pulse to measure movement of the MEMS structure. Advantageously, the same light source can be utilized to stimulate movement of the MEMS structure and to measure movement of the MEMS structure.

Stimulating an optical sensor using optical radiation pressure

An optical sensor including a MEMS structure, and a grating coupled resonating structure positioned adjacent to the MEMS structure, the grating coupled resonating structure comprising an interrogating grating coupler configured to direct light towards the MEMS structure. The interrogating grating coupler is two dimensional, and the interrogating grating coupler and the MEMS structure form an optical resonant cavity.

Optical cantilever based analysis

An apparatus for detecting a deflection of a beam, the apparatus comprising a beam having a first side and a second side; and a grating structure positioned adjacent the second side of the beam, the grating structure including an interrogating grating coupler configured to direct light towards the beam; wherein the beam and the interrogating grating coupler form a resonant cavity, and light input to the resonant cavity is modulated according to the deflection of the beam.

Optical cantilever based analyte detection

An apparatus for detecting a presence of one or more analytes in a sample. The apparatus comprises a cantilever () and a grating coupled resonating structure (). The cantilever () comprises an analyte selective coating that is selective to the one or more analytes. The grating coupled resonating structure () is positioned adjacent to the cantilever (). The first grating coupled resonating structure comprises a first interrogating grating coupler () which together with the cantilever forms an optical resonant cavity.

An example tunable cavity resonator for filtering radiation in the optical and IR wavelengths and an example method for fabricating same. The example resonator includes a pair of reflectors, one in fixed relationship to a substrate and the other formed upon a suspended moveable membrane disposed a cavity length from the one reflector. The resonator also includes a pair of spaced apart electrodes either constituted by the reflectors or juxtaposed therewith, which are electrostatically operable to move the membrane and other reflector relative to the one reflector.

Tunable cavity resonator and method for fabricating same

A tunable infrared detector is provided that includes a substrate, a bottom wavelength detector formed over the substrate, a top wavelength detector formed over the first wavelength detector layer, and an interferometer filter formed over the top wavelength detector layer and the bottom wavelength detector layer. The interferometer filter is operatively configured to pass a first wavelength associated with a first portion of a predetermined band and a second wavelength associated with a second portion of the predetermined band to the top wavelength detector. The top wavelength detector is operatively configured to detect each wavelength associated with the first portion of the predetermined band and to transmit each wavelength associated with the second portion of the predetermined band to the bottom wavelength detector. The bottom wavelength detector is operatively configured to detect each wavelength associated with the second portion of the predetermined band.

Spectrally tunable infrared image sensor having multi-band stacked detectors

A detector device for detecting incident radiation at particular wavelengths is disclosed. The device includes a base layer comprising a substrate. A resonant cavity is formed on the base layer between a pair of reflectors. One reflector is formed by a first reflector layer disposed in fixed relationship with respect to the base layer and the other reflector is formed by a second reflector layer disposed on a membrane in substantially parallel relationship to the substrate. A detector is provided within the cavity to absorb incident radiation therein for detection purposes. By placing the absorbing layer of the detector within the resonant cavity, high quantum efficiency can be achieved using very thin absorbing layers, thus significantly reducing the detector volume and hence noise. Various different arrangements of the detector device and different methods of fabricating the same are also disclosed.

Growing community of inventors

Bull Creek, Australia

John Marcel Dell